Method for forming optical waveguide quantum chip on gradual periodically polarized lithium tantalate by proton exchange method

Abstract

The invention relates to a method for forming an optical waveguide quantum chip on gradual periodically polarized lithium tantalate by a proton exchange method, and belongs to the field of optoelectronic device preparation methods. The method comprises the following steps: a gradual periodically polarized lithium tantalate is cleaned; a titanium film and a chromium film are sequentially plated on the surface of the substrate; a mask sample for proton exchange is form by performing ultraviolet light etching on the surface of the chromium film; the obtained sample is subjected to proton exchange at 200-300 DEG C so as to form a strip optical waveguide; the two end surfaces perpendicular to the optical waveguide are optically ground and polished; the optical waveguide performance of the waveguide is tested by a light passing experiment; and the two polished end surfaces are coupled by optical fiber end surfaces and cured by UV glue, and the two ends of the optical fiber jumper are used as input and output ends respectively so as to prepare the optical quantum chip. The optical waveguide chip with high performance, low transmission loss, micron scale and good crystal nonlinearity can be prepared and the crystal nonlinearity tuning range is wide.

Description

technical field [0001] The invention relates to a method for forming an optical waveguide quantum chip on gradually changing periodic poled lithium tantalate by adopting a proton exchange method, and belongs to the technical field of preparation methods of optoelectronic devices. Background technique [0002] The size and computing speed of silicon-based transistors are approaching the theoretical limit. In order to solve this problem, scientists seek to use photons instead of electrons to perform complex calculations faster, and the concept of photonic computers came into being. However, most of the existing quantum computing technologies need to cool materials to around absolute zero (-273.15°C), which hinders the progress of quantum computers from theory to practical use. High-efficiency integrated quantum optical chips can be produced by using the optical parameter down-conversion process in ferroelectric crystal materials lithium tantalate and lithium niobate. Integrat...

AI Technical Summary

Problems solved by technology

However, the loading method in this patent application must first form a planar thin film structure of materials such as lithium niobate and lithium tantalate, and then form a loaded waveguide on this basis, and the processing steps are complicated.

Furthermore, the loading ridge material is amorphous, and improper process control can easily cause large waveguide scattering loss

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