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Frequency converter based on ridge-type lithium niobate monocrystal thin-film waveguide integrated periodic domain reversal structure, and preparation thereof

A single crystal thin film and waveguide integration technology, applied in the direction of instruments, manufacturing tools, welding equipment, etc., to achieve high-efficiency frequency conversion, improve integration, and improve frequency doubling conversion efficiency

Active Publication Date: 2019-12-13
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Up to now, there is no report on the preparation of periodic domain inversion quasi-phase matching structure on LNOI (Z-cut) by femtosecond laser direct writing technology, so as to achieve frequency-doubling light output at a specific wavelength

Method used

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  • Frequency converter based on ridge-type lithium niobate monocrystal thin-film waveguide integrated periodic domain reversal structure, and preparation thereof
  • Frequency converter based on ridge-type lithium niobate monocrystal thin-film waveguide integrated periodic domain reversal structure, and preparation thereof
  • Frequency converter based on ridge-type lithium niobate monocrystal thin-film waveguide integrated periodic domain reversal structure, and preparation thereof

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Effect test

Embodiment 1

[0050] Such as Figure 1~5 As shown, the preparation of a frequency converter (laser with frequency doubling 1550nm) based on femtosecond laser direct writing lithium niobate single crystal thin film periodic domain inversion structure includes the following steps:

[0051] (1) Based on Z-cut lithium niobate single crystal thin film, combined with multiple scanning technology (such as image 3 shown), the femtosecond laser (pulse width 400fs, wavelength 1031nm, repetition frequency 25kHz, single pulse energy 0.25μJ) converged by a microscope objective lens (50 times, N.A.=0.67) was incident perpendicular to the surface of the LNOI, penetrating the upper layer Lithium niobate single crystal thin film and repeated scanning 6 times at a scanning speed of 1mm / s (each time along the +Y or -Y direction), the polarization direction of the femtosecond laser is consistent with the scanning direction, and the 6 tracks will be in the X direction Closely spaced from each other, the width...

Embodiment 2

[0056] Such as Figure 1~5 As shown, the preparation of the frequency converter (laser with frequency doubling 1310nm) based on the femtosecond laser direct writing lithium niobate single crystal thin film periodic domain inversion structure includes the following steps:

[0057] (1) Based on Z-cut lithium niobate single crystal thin film, combined with multiple scanning technology (such as image 3 shown), the femtosecond laser (pulse width 400fs, wavelength 1031nm, repetition frequency 25kHz, single pulse energy 0.25μJ) converged by a microscope objective lens (50 times, N.A.=0.67) was incident perpendicular to the surface of the LNOI, penetrating the upper layer Lithium niobate single crystal thin film and repeated scanning 4 times at a scanning speed of 1mm / s (each time along the +Y or -Y direction), the polarization direction of the femtosecond laser is consistent with the scanning direction, and the 4 tracks will be in the X direction Closely spaced from each other, the...

Embodiment 3

[0062] Such as Figure 1~5 As shown, the preparation of the frequency converter (laser with frequency doubling 1064nm) based on femtosecond laser direct writing lithium niobate single crystal thin film periodic domain inversion structure includes the following steps:

[0063] (1) Based on Z-cut lithium niobate single crystal thin film, combined with multiple scanning technology (such as image 3 shown), the femtosecond laser (pulse width 400fs, wavelength 1031nm, repetition frequency 25kHz, single pulse energy 0.25μJ) converged by a microscope objective lens (50 times, N.A.=0.67) was incident perpendicular to the surface of the LNOI, penetrating the upper layer The lithium niobate single crystal thin film is scanned twice at a scanning speed of 1mm / s (each time along the +Y or -Y direction). The polarization direction of the femtosecond laser is consistent with the scanning direction, and the two tracks will be in the X direction Closely spaced from each other, the width of e...

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Abstract

The invention relates to a frequency converter based on a ridge-type lithium niobate monocrystal thin-film waveguide integrated periodic domain reversal structure, and preparation thereof. The preparation comprises the following steps: preparing a periodic structure with domain reversal region duty ratio as 0.5 on a lithium niobate monocrystal thin-film surface by using the same laser processing parameter; and then preparing ridge-type waveguide on the lithium niobate monocrystal thin-film by applying femtosecond laser direct writing or precise diamond knife-cutting technology, and integratingon a pre-processed periodic structure; and then performing polishing treatment on two X end surfaces of the LNOI, cleaning and obtaining polished surfaces; and then integrating a semiconductor laserand an optical fiber coupling system, the lithium niobate monocrystal thin-film waveguide with the periodic domain reversal structure and an optical filter, thereby realizing the frequency conversionfunction of the laser with specific wavelength. The frequency converter disclosed by the invention has the features of being high in conversion efficiency, good in beam quality and long in life; and the product is mainly applied to the optical fiber communication, the electronics device preparation, the information storage, the infrared detection and like fields.

Description

technical field [0001] The invention relates to a frequency converter and a preparation method of a ridge-type lithium niobate single-crystal thin-film waveguide integrated periodic domain inversion structure, and belongs to the technical field of optoelectronic device preparation. Background technique [0002] Femtosecond laser direct writing is a new and well-known technology in the field of micro-nano processing of materials. Due to its high processing precision, good quality and short time, this technology is widely used in integrated optics, photonics, etc. science, microfluidic optics, and biomedicine. In 1996, Davis et al. demonstrated through experiments that the femtosecond laser is focused inside the glass through a microscope objective lens, which can permanently change the optical properties of the focal area. In addition, by choosing appropriate laser processing parameters, the refractive index of the focal region can be increased, which can be used to fabricat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/355G02F1/35G02F1/377B23K26/362
CPCB23K26/362G02F1/3544G02F1/3551G02F1/3775
Inventor 陈峰张彬王磊李子琦李玲琪熊秉诚
Owner SHANDONG UNIV
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