Interdigital PN-junction battery structure of IBC battery and fabrication method of interdigital PN-junction battery structure

Abstract

The invention discloses an interdigital PN-junction battery structure of an IBC battery and a fabrication method of the interdigital PN-junction battery structure. The battery structure sequentially comprises a silicon nitride anti-reflection film layer, a first silicon nitride thin film layer, an N-type single-crystal wafer substrate, an interdigital P region and N region layer, a second siliconnitride thin film layer and a Al2O3 thin film layer. The fabrication method comprises the steps of doping a back surface of the N-type single-crystal wafer substrate by a mode of printing and picoseconds laser doping, and performing phosphorus doping on a region which is not printed; growing a silicon nitride thin film by a mode of oxidization; depositing an intrinsic amorphous silicon layer; depositing the silicon nitride anti-reflection thin film; depositing the Al2O3 thin film; and opening a hole, and printing aluminum paste on the back surface to form a metal electrode. By the battery structure and the preparation method, the manufacturing process is reduced, and the manufacturing cost of the IBC battery is reduced; and moreover, the fabrication of high-quality PN on the back surface of the IBC battery can be achieved, and great output of an internal current of the IBC battery is achieved.

Description

technical field

[0001] The invention relates to a battery structure of an interdigitated PN junction of an IBC battery and a preparation method thereof, belonging to the technical field of solar batteries. Background technique

[0002] In recent years, driven by the national photovoltaic policy, the installed capacity of photovoltaic power generation has grown rapidly, and photovoltaic technology has developed rapidly. More and more photovoltaic enterprises have increased investment in research and development of IBC battery technology. They are all vigorously developing technology, and IBC has become one of the focuses of high-efficiency battery technology development due to its excellent battery technology. It can be seen that the advantages of N-type battery technology in the global photovoltaic market are becoming more and more obvious, especially the urgent need for photovoltaic power grid parity. Continuous technological innovation to minimize the cost of photovoltaic ...

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