TFT substrate and its preparation method, display device

A substrate and substrate substrate technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as unevenness, side etching, and fast etching of copper film layers, so as to prevent damage and prevent side Eclipse effect
CN110676266BActive Publication Date: 2022-05-27TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
Publication Date
2022-05-27

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Abstract

The invention discloses a TFT substrate, a preparation method thereof, and a display device, which can make the line width of the copper film layer in the back channel etching-indium gallium zinc oxide type TFT substrate thinner, so that it can be applied to higher resolution At the same time, the molybdenum film layer as the bottom layer of the channel is dry-etched by NF3 and O2 etching gases to prevent the indium gallium zinc oxide film layer from being damaged.
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Description

technical field

[0001] The present invention relates to the technical field of display, and in particular, to a TFT substrate, a preparation method thereof, and a display device. Background technique

[0002] Liquid Crystal Display (LCD) has many advantages such as thin body, power saving, no radiation, etc., and has been widely used, such as: mobile phone, personal digital assistant (PDA), digital camera, computer screen or notebook computer screen etc.

[0003] Organic Light-Emitting Diode (OLED) display, also known as organic electroluminescent display, is an emerging flat panel display device, due to its simple preparation process, low cost, low power consumption, high luminous brightness, It has a wide range of working temperature adaptation, light and thin volume, fast response speed, easy to achieve color display and large-screen display, easy to achieve matching with integrated circuit drivers, easy to achieve flexible display and other advantages, so it has broad a...

Claims

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