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Continuous doctor-blading shaping method and equipment of water-base gel for raw thin wafer of ceramic device

A water-based gel and ceramic technology, applied in the field of material science, can solve problems such as high cost, solvent toxicity, and serious environmental pollution, and achieve the effects of low production cost, less usage, and less environmental pollution

Inactive Publication Date: 2003-05-21
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the traditional tape casting process is that the solvents used (benzene, toluene, xylene, etc.) have certain toxicity, serious environmental pollution and high cost
The disadvantage of this process method is that it needs to be protected by atmosphere, so the molding process cannot be completed on the usual tape casting machine.

Method used

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  • Continuous doctor-blading shaping method and equipment of water-base gel for raw thin wafer of ceramic device
  • Continuous doctor-blading shaping method and equipment of water-base gel for raw thin wafer of ceramic device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] Embodiment 1: 95 alumina ceramic substrate water-based gel casting molding

[0019] Add 10 grams of acrylamide monomer and 0.01 gram of methylenebisacrylamide to 100 milliliters of water to make a pre-preparation solution, add 400 grams of 95 alumina powder, and add 1 gram of ammonium citrate as a dispersant; the prepared slurry Ball milling and mixing for 40 hours; adding 0.5 ml of ammonium persulfate solution and 0.3 ml of tetramethylethylenediamine solution; using nitrogen protection on a continuous water-based gel casting machine at 60 ° C to complete casting molding to obtain a solidified green sheet, dry The back thickness is 0.2mm.

Embodiment 2

[0020] Example 2: Silicon carbide sheet water-based gel tape casting

[0021] Add 11 grams of methacrylamide monomer and 0.01 gram of methylene bisacrylamide to 100 milliliters of water to make a pre-preparation solution, add 340 grams of silicon carbide powder to the pre-preparation solution, add 0.3 milliliters of tetramethylammonium hydroxide as Dispersant; mix the prepared slurry by ball milling for 20 hours; add 0.6 ml of potassium persulfate solution; use argon protection to complete the polymerization reaction on a continuous water-based gel casting machine at 80 ° C to obtain a solidified green sheet and dry The back thickness is 0.5mm.

Embodiment 3

[0022] Embodiment 3: Water-based gel tape casting of lead zirconate titanate (PZT) ceramic capacitor thin film device

[0023] Lead zirconate titanate powder synthesized by chemical reaction, with a particle size of 0.5-2 microns and a density of 7.6g / cm 3 . A certain amount of lead zirconate titanate powder was added to the pre-mixture of Example (2), and 1% polyacrylic acid was added as a dispersant to make a 55vol% suspension slurry; ball milled for 60 hours; by 100:1 Add ammonium persulfate solution; cast on a continuous water-based gel casting machine, use nitrogen protection to complete the polymerization reaction at 60° C., and obtain a green sheet with a thickness of 0.8 mm.

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Abstract

A continuous doctor-blading process for preparing thin wafer blank of ceramic device includes such steps as mixing and dissolving organic monomer, cross-linking agent and water to obtain pre-prepared liquid, adding ceramic powder and disperser, ball grinding, removing bubbles, adding polymerization trigger of monomer and catalyst, uniform stirring, and solidifying on doctor-blading machine. Its advantages are less consumption of organic substance, less environmental pollution, low cost, high filming speed and continuous production.

Description

technical field [0001] The invention relates to a water-based gel casting continuous molding method and device for thin ceramic device blanks, belonging to the technical field of material science. Background technique [0002] Tape Casting is a molding method that can obtain high-quality, ultra-thin ceramic substrates. At present, it has been possible to form thin ceramic materials with a thickness of more than 3 μm. It is characterized by simple equipment, stable process, high production efficiency and high automation. The disadvantage of the traditional tape casting process is that the solvents used (benzene, toluene, xylene, etc.) have certain toxicity, serious environmental pollution and high cost. In addition, the content of organic matter in the slurry is high, the density of the green body is low, and the green body is easily deformed and cracked during the degreasing process, which affects the product quality. In response to the above shortcomings, researchers beg...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28B1/29
Inventor 黄勇向军辉谢志鹏杨金龙陈少荣
Owner TSINGHUA UNIV
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