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A method for preparing porous anode aluminum foil with ALD-assisted nitrogen-doped micro-nano aluminum powder

A porous anode and nitrogen doping technology, which is applied in anodic oxidation, heating inorganic powder coating, electrolytic capacitors, etc., can solve the problems of large particle size aluminum powder that is not easy to sinter, the specific surface area of ​​the electrode foil is reduced, and the capacitance of the electrode foil is reduced. , to avoid capacitance drop, large porosity and specific surface area, and reduce leakage current

Active Publication Date: 2021-05-28
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] In order to overcome the above-mentioned shortcoming of the prior art, the object of the present invention is to provide a kind of method that ALD assists nitrogen-doped micro-nano aluminum powder to prepare porous anode aluminum foil, to solve the problems existing in the above-mentioned prior art: (1) large particle size Aluminum powder is not easy to sinter; (2) The specific surface area of ​​the electrode foil decreases during the fusion process of small particle size aluminum powder; Capacitance drops or even drops powder

Method used

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  • A method for preparing porous anode aluminum foil with ALD-assisted nitrogen-doped micro-nano aluminum powder

Examples

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Embodiment 1

[0038] Mix aluminum powder with an average particle size of 10 μm (high-purity aluminum powder above 99.99%) and ethyl cellulose at a ratio of 10:1, and disperse the mixed powder and toluene in toluene at a mass ratio of 1.5:1 In the process, a 60% dispersion liquid was formed and coated on a 40 μm aluminum foil, and a 50 nm aluminum nitride film was deposited by ALD technology. Specifically: 1) put the above-mentioned electrode foil into the ALD reaction chamber, evacuate to 10Pa, and heat the reaction chamber to 50°C; 2) After feeding the precursor into the reaction chamber for 0.2s, clean it with high-purity nitrogen for 5s, flush Remove reaction by-products and residual precursors, the precursors can be trimethylaluminum or other organoaluminum compounds; 3) After passing 2s plasma hydrogen into the reaction chamber (RF power 80W), use high-purity nitrogen Wash for 5s to wash away reaction by-products and residual oxygen; 4) Repeat steps 2) and 3) until the thickness of al...

Embodiment 2

[0041] Mix aluminum powder with an average particle size of 3 μm (high-purity aluminum powder above 99.99%) and ethyl cellulose at a ratio of 5:1, and disperse the mixed powder and toluene in toluene at a mass ratio of 1.5:1 In the process, a 60% dispersion liquid was formed and coated on a 35 μm aluminum foil, and a 35 nm aluminum nitride film was deposited by ALD technology. Specifically: 1) put the above-mentioned electrode foil into the ALD reaction chamber, evacuate to 10Pa, and heat the reaction chamber to 150°C; 2) After feeding the precursor into the reaction chamber for 0.1s, clean it with high-purity nitrogen for 10s, flush Remove reaction by-products and residual precursors, the precursors can be trimethylaluminum or other organoaluminum compounds; 3) After passing 2s plasma hydrogen into the reaction chamber (RF power 80W), use high-purity nitrogen Wash for 10s to wash away reaction by-products and residual oxygen; 4) Repeat steps 2) and 3) until the thickness of a...

Embodiment 3

[0044] Mix aluminum powder with an average particle size of 3 μm (high-purity aluminum powder above 99.99%) and acrylic resin at a ratio of 5:1, and disperse the mixed powder with trichloropropane at a mass ratio of 3:1 to three In chloropropane, a 75% dispersion is coated on a 35 μm aluminum foil, and a 35 nm aluminum nitride film is deposited by ALD technology. Specifically: 1) Put the above-mentioned electrode foil into the ALD reaction chamber, evacuate to 10Pa, and heat the reaction chamber to 250°C; 2) After feeding the precursor into the reaction chamber for 0.1s, clean it with high-purity nitrogen for 10s, flush Remove reaction by-products and residual precursors, the precursors can be trimethylaluminum or other organoaluminum compounds; 3) After passing 2s plasma hydrogen into the reaction chamber (RF power 80W), use high-purity nitrogen Wash for 10s to wash away reaction by-products and residual oxygen; 4) Repeat steps 2) and 3) until the thickness of aluminum nitrid...

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Abstract

The invention discloses an ALD-assisted method for preparing porous anode aluminum foil with nitrogen-doped micro-nano aluminum powder. Firstly, aluminum powder or aluminum alloy powder is used to coat the aluminum foil, and then the ALD technology is supplemented by plasma enhancement, and the aluminum Metal-organic compounds are used as precursors to deposit a layer of aluminum nitride on the surface of the electrode foil. After high-temperature calcination, anodic oxidation, annealing, and supplementation, nitrogen-doped porous anode aluminum foil is obtained. The electrode foil prepared by this method has high electrostatic capacity and breakdown field strength, and has a small leakage current. The aluminum powder is uniformly doped with nitrogen, and the aluminum nitride acts as a passivator on the surface, thereby reducing the nanometer or The risk of submicron powder oxidation and ignition greatly increases the safety of electrode foil during storage and transportation.

Description

technical field [0001] The invention belongs to the field of aluminum electrolytic capacitors, and relates to an ALD-assisted method for preparing porous anode aluminum foil with nitrogen-doped micro-nano aluminum powder. Background technique [0002] Electrolytic capacitors are widely used in consumer electronics, information industry, automotive electronics and many other fields. At present, the commonly used electrolytic capacitors mainly include tantalum electrolytic capacitors and aluminum electrolytic capacitors. Aluminum electrolytic capacitors have the advantages of large volume specific capacity and low cost per unit capacity. Aluminum electrolytic capacitors are mainly composed of anode foil, cathode foil, electrolyte and electrolytic paper. The anode foil is usually a porous corroded aluminum foil prepared by electrochemical corrosion, and then a nano-scale aluminum oxide film is grown on the surface of the corroded aluminum foil through the anodic oxidation proc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/34C23C16/455C23C16/505C23C24/08C25D11/08C25D11/06C25D11/12H01G9/045H01G9/055
CPCC23C16/303C23C16/4554C23C16/505C23C24/08C25D11/06C25D11/08C25D11/12H01G9/045H01G9/055
Inventor 杜显锋李响熊礼龙
Owner XI AN JIAOTONG UNIV
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