Silicon carbide ceramic sucker and preparation method thereof

A silicon carbide ceramic and silicon carbide powder technology, applied in ceramic products, other household appliances, household appliances, etc., can solve the problems of easy deformation, poor temperature resistance, acid and alkali resistance, poor suction cup accuracy, etc. Good acid-base corrosion performance and small thermal deformation coefficient

Inactive Publication Date: 2020-07-10
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the present invention is to provide a silicon carbide ceramic sucker and its preparation method to solve the problems of poor precision, easy deformation, poor temperature and acid and alkali resistance of existing suckers

Method used

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  • Silicon carbide ceramic sucker and preparation method thereof

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preparation example Construction

[0042] Another embodiment of the present invention proposes a method for preparing a silicon carbide ceramic chuck, which includes:

[0043] (1) Preparation of ceramic base: mixing silicon carbide powder, carbon black powder, adhesive and water to obtain a dense silicon carbide ceramic slurry; making the dense silicon carbide ceramic slurry into a ceramic base green body; The ceramic base blank is sintered and precisely processed to obtain a dense silicon carbide ceramic base; wherein, the weight ratio of the silicon carbide powder, carbon black powder, binder and water is: 60-80:5-15: 3-6:10-25;

[0044] In this step, the silicon carbide ceramic base with complex vacuum channels and lightweight structure is prepared by molding method, isostatic pressing method, grouting method or gel injection molding method. The gel injection molding method is preferred, and the sintering temperature is 1500 -2200°C.

[0045](2) Preparation of the ceramic sucker body: mix silicon carbide p...

Embodiment 1

[0056] A method for preparing a silicon carbide ceramic sucker, which mainly includes the following steps:

[0057] (1) silicon carbide powder: 30 parts; carbon powder (ignition loss agent): 8 parts; alumina powder and quartz powder (bonding agent): 1 part; monomer and crosslinking agent: 1 part; and water: 60 parts were weighed in proportion, poured into a stirrer for stirring, and mixed for 12 hours to obtain a porous silicon carbide ceramic slurry;

[0058] (2) Pour 0.1 part of initiator ammonium persulfate into the porous silicon carbide ceramic slurry prepared in step (1), continue stirring and mixing for 30 minutes;

[0059] (3) Inject the ceramic slurry obtained in step (2) into a mold, heat to 50° C. and keep it warm for 2 hours to solidify the slurry and obtain a porous silicon carbide ceramic blank. After taking it out, dry it at room temperature for 48 hours;

[0060] (4) Put the dried porous silicon carbide ceramic blank into a muffle furnace, heat up to 1500°C, a...

Embodiment 2

[0070] A method for preparing a silicon carbide ceramic sucker, which mainly includes the following steps:

[0071] (1) Silicon carbide powder: 50 parts; Ignition loss agent carbon powder: 18 parts; Binder quartz powder: 1 part; Monomer and crosslinking agent: 2 parts, and water: 27 parts Weigh in proportion, pour into the stirrer, stirred and mixed for 12 hours to obtain porous silicon carbide ceramic slurry;

[0072] (2) Pour 0.1 part of initiator ammonium persulfate into the ceramic slurry prepared in step 1, continue to stir, and mix for 30 minutes;

[0073] (3) Inject the ceramic slurry obtained in step (2) into a mold, heat to 50° C. and keep it warm for 2 hours to solidify the slurry and obtain a porous silicon carbide ceramic blank. After taking it out, dry it at room temperature for 48 hours;

[0074] (4) Put the dried porous silicon carbide ceramic blank into a muffle furnace, heat up to 1300°C, and sinter to obtain porous silicon carbide ceramics. The sintered poro...

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Abstract

The invention relates to a silicon carbide ceramic sucker and a preparation method thereof. The silicon carbide ceramic sucker comprises a sucker body and a sucker base connected with the sucker body,the sucker base is provided with an air channel and an air exhaust connector, the sucker body is made of porous silicon carbide ceramic, and the sucker base is made of compact silicon carbide ceramic. The sucker body and the sucker base are bonded together through an organic binder or a high-temperature inorganic binder. The porous silicon carbide ceramic sucker body and the compact silicon carbide ceramic sucker base are prepared through a gel casting method, and the porous silicon carbide ceramic sucker body and the compact silicon carbide ceramic sucker base are compounded through a bonding or high-temperature sintering process to obtain the silicon carbide ceramic sucker. The ceramic sucker prepared from the silicon carbide material has the characteristics of ultrahigh planeness (up to 1 micron), difficulty in deformation, high temperature resistance, good acid and alkali corrosion resistance and the like, and can meet the high-precision use requirements of integrated circuit manufacturing equipment.

Description

technical field [0001] The invention relates to the technical field of ceramic suckers, in particular to a silicon carbide ceramic sucker and a preparation method thereof. Background technique [0002] With the increasing market demand for chip fingerprint recognition functions, the chip packaging process has also changed accordingly, one of which is to polish the substrate to meet the corresponding surface roughness, thickness and flatness requirements. The model of the currently used grinding machine is VG-500. Its working principle is to adsorb the substrate on the grinding base with a ceramic suction cup. The main shaft rotates and the grinding base rotates to realize the grinding function, and then the grinding dust is taken away by clean water to realize the cleaning function. [0003] The existing porous suction cup mainly uses metal material as the base, uses porous alumina as the adsorption surface, and uses the adhesive process to compound the two. Due to the large...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B38/06C04B35/565C04B35/622C04B35/624C04B35/63C04B35/634
CPCC04B38/0645C04B38/068C04B35/565C04B35/622C04B35/624C04B35/6316C04B35/634
Inventor 刘海林贾志辉黄小婷胡传奇李荟
Owner CHINA BUILDING MATERIALS ACAD
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