Titanium-aluminum-molybdenum alloy target material and preparing method thereof
A molybdenum alloy, titanium-aluminum technology, applied in the field of titanium-aluminum-molybdenum alloy target and its preparation, can solve the problems of relatively large difference, difficult to achieve large size, easy cracking in product processing, etc. , the effect of high density
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[0029] The second aspect of the present invention provides a method for preparing a titanium-aluminum-molybdenum alloy target, see figure 1 ,include:
[0030] S100. Titanium powder with a purity of 99.5% or more and an average particle size of 20-40um, aluminum powder with a purity of 99.5% or more and an average particle size of 10-30um, and a purity of 99.5% or more and an average particle size of 5-10um Put the molybdenum powder into a V-shaped mixer or a three-dimensional mixer, and mix for 4 to 6 hours under the protection of vacuum or high-purity argon.
[0031] S200. Put the mixed powder into a cold isostatic pressing mold, perform cold isostatic pressing under a pressure of 20-100 MPa, and hold the pressure for 10-30 minutes to obtain a titanium-aluminum-molybdenum alloy billet.
[0032] S300. Reshape the titanium-aluminum-molybdenum alloy blank by a lathe or milling machine, so that the shape of the titanium-aluminum-molybdenum alloy blank is a preset shape; wherein,...
Embodiment 1
[0039] The first aspect of this embodiment provides a titanium-aluminum-molybdenum alloy target, which comprises the following components in mass percentage: 20at% titanium, 60a% aluminum, and 20at% molybdenum.
[0040] The second aspect of this embodiment provides a method for preparing a titanium-aluminum-molybdenum alloy target, including the following steps:
[0041] (1) Put titanium powder with a purity of more than 99.5% and an average particle size of 30um, aluminum powder with a purity of more than 99.5% and an average particle size of 30um, and molybdenum powder with a purity of more than 99.5% and an average particle size of 6.8um into a three-dimensional mixer, and mixed for 4 hours under vacuum or high-purity argon protection.
[0042] (2) Put the mixed powder into a cold isostatic pressing mold, perform cold isostatic pressing under a pressure of 100 MPa, and hold the pressure for 10 minutes to obtain a titanium-aluminum-molybdenum alloy billet.
[0043] (3) The ...
Embodiment 2
[0050] The first aspect of this embodiment provides a titanium-aluminum-molybdenum alloy target, which comprises the following components in mass percentage: 38at% titanium, 50a% aluminum, and 12at% molybdenum.
[0051] The second aspect of this embodiment provides a method for preparing a titanium-aluminum-molybdenum alloy target, including the following steps:
[0052] (1) Put titanium powder with a purity of more than 99.5% and an average particle size of 35um, aluminum powder with a purity of more than 99.5% and an average particle size of 24um, and molybdenum powder with a purity of more than 99.5% and an average particle size of 8um In a V-type blender or a three-dimensional blender, mix for 5 hours under vacuum or high-purity argon protection.
[0053] (2) Put the mixed powder into a cold isostatic pressing mold, perform cold isostatic pressing under a pressure of 80 MPa, and hold the pressure for 20 minutes to obtain a titanium-aluminum-molybdenum alloy billet.
[005...
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