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Method for manufacturing nano-scale electric jet-flow spray head based on SU-8 glue electrolytic process

A nano-scale, SU-8 technology, applied in coating devices, additive processing, etc., can solve the problems of high cost and complex process of nano-scale electrojet nozzles, and achieve low cost, simple preparation process and easy operation. Effect

Active Publication Date: 2020-07-24
JILIN UNIV
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to propose a new process for preparing nanoscale electrojet nozzles based on the SU-8 electrolysis method in view of the high cost and complicated process of preparing nanometer electrojet nozzles by conventional methods

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  • Method for manufacturing nano-scale electric jet-flow spray head based on SU-8 glue electrolytic process
  • Method for manufacturing nano-scale electric jet-flow spray head based on SU-8 glue electrolytic process

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Embodiment Construction

[0014] The specific implementation manner of the patent of the present invention will be described in detail below in conjunction with the technical scheme and accompanying drawings.

[0015] 1. Microstructure fabrication of nanoscale electrofluidic nozzles

[0016] (1) Spin-coat a layer of SU-8 photoresist 2 with a thickness of about 20 microns on the silicon substrate 1, the spin-coating speed is 3000 rpm, and the spin-coating time is 30 seconds. Incomplete pre-baking of SU-8 glue, the pre-baking temperature is 70 degrees Celsius, and the time is 4-5 minutes. Incomplete pre-baking can increase the conductivity of SU-8, ensure that step 2 can form linear and uniform nano-cracks, and prevent the bifurcation of nano-cracks.

[0017] (2) Align the photolithographic mask plate with the SU-8 glue substrate, and overexpose the SU-8 glue, and the exposure time is 15 minutes. Overexposure can promote the embrittlement of SU-8 glue, which is a necessary condition for the formation o...

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Abstract

The invention relates to nano-scale electric jet-flow spray head equipment, in particular to a method for manufacturing a nano-scale electric jet-flow spray head based on a SU-8 glue electrolytic process. The method is characterized by comprising the following steps: adopting SU-8 glue as an electric jet-flow spray needle material, and creating necessary conditions for forming nano cracks throughan incomplete drying and over-exposure way; taking a graphene straight line as an induced graph, and forming a linear nano channel with a relatively uniform dimension below the induced graph under electrolytic action of high-voltage electricity; and forming the final nano-scale electric jet-flow spray head through steps of thermo-compression bonding, ultra-violet lithography and electrode manufacturing.

Description

technical field [0001] The invention relates to the preparation of electrojet printing nozzles, in particular to a method for preparing nanoscale electrojet nozzles by means of electrolysis of SU-8 glue. Background technique [0002] The direct write method is a printing technique that does not require masks, molds or additional auxiliary equipment. It has shown great application prospects in prototype development, small batch production, model restoration and other fields. Direct writing methods currently mainly include methods such as fused deposition rapid prototyping, photocuring molding, three-dimensional powder bonding, selective laser sintering, and electro-fluidic printing. In the above method, since the electro-jet printing is based on the electro-hydraulic hydrodynamic effect, that is, the ink is pulled by the high-voltage electric field, and the internal charge is concentrated at the meniscus of the nozzle, thereby triggering the electro-jet, combined with the th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B29C64/209B33Y30/00
CPCB33Y30/00B29C64/209
Inventor 殷志富杨雪贾炳强胡伟李露
Owner JILIN UNIV
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