Preparation method of miniature solid silicon needle

A solid, miniature technology, applied in micro-needles, patterned surface photoengraving process, needles, etc., can solve the problems of increasing the risk of disease infection, skin damage, bleeding, etc., to speed up the internal etching reaction, and the needle body diameter Effect

Pending Publication Date: 2020-09-18
苏州恒之清生物科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although this method is effective, the injection usually brings additional pain to the patient, and it is easy to cause local skin damage and bleeding at the injection point, which increases the risk of disease transmission

Method used

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  • Preparation method of miniature solid silicon needle
  • Preparation method of miniature solid silicon needle
  • Preparation method of miniature solid silicon needle

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Experimental program
Comparison scheme
Effect test

Embodiment

[0037] Such as image 3 Shown, the preparation method of miniature solid silicon needle in the present embodiment, comprises the following steps:

[0038] 1) Select (100) crystal planes, single- or double-sided polished single-crystal silicon wafers, the selected single-crystal silicon wafers are N-type, and the resistivity is 5Ω cm (in actual operation, the resistivity range is selected to be 1 -10Ω·cm, the thickness can be 700±10μm). After cleaning with standard cleaning solution RCA1 (the molar ratio of water:ammonia:hydrogen peroxide is 5:1:1) and RCA2 (the molar ratio of water:hydrochloric acid:hydrogen peroxide is 5:1:1), it is cleaned with deionized water and dehydrated dry.

[0039] 2) A single crystal silicon wafer is oxidized to grow a layer of silicon dioxide in the order of wet oxygen-dry oxygen. The oxidation temperature is controlled below 1100 ° C, and the time of wet oxygen and dry oxygen is 5 hours.

[0040] 3) Deposit a layer of silicon nitride with a thic...

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Abstract

The invention provides a preparation method of a miniature solid silicon needle. The method comprises steps of firstly, growing a layer of silicon dioxide on the surface of monocrystalline silicon; depositing a layer of silicon nitride protective film on the surface of the silicon dioxide, coating photoresist on the surface of the silicon nitride protective film, exposing, developing, etching andthe like, and the etching reaction can be accelerated in the silicon etching process by adopting silicon nitride as the protective film, so that the diameter of the base of the silicon needle is smaller. The preparation method is simple in process, the solid silicon needle is good in durability, and the solid silicon needle is suitable for transdermal drug permeation of biomacromolecule drugs.

Description

technical field [0001] The invention relates to the technical field of surface micromachining and manufacturing of semiconductor silicon materials, in particular to a preparation method of miniature solid silicon needles. Background technique [0002] Due to the degradation of drugs in the gastrointestinal tract and the first-pass effect in the liver, most orally administered drugs are mostly or completely ineffective before reaching the site of action. In addition, the medication adaptability of patients is also a problem. Most oral medications need to be taken at certain intervals during treatment, which brings a lot of inconvenience to patients. [0003] In addition, another common way of administration is injection, which can allow drugs to penetrate biological barriers, including subcutaneous injection and intravenous infusion. Although this method is effective, the injection usually brings additional pain to the patient, and it is also easy to cause local skin damage ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/04B81C1/00A61M37/00
CPCB81B7/04B81C1/00111B81C1/00444A61M37/0015A61M2037/0053B33Y10/00B33Y80/00G03F7/0037G03F7/094A61M2037/0046C23C16/56C23C16/0272C23C16/345C23C16/50A61M2205/0238B81C2201/0112B81C2201/0132B81C2201/0133B81C2201/0178G03F7/162G03F7/26
Inventor 朱红飞
Owner 苏州恒之清生物科技有限公司
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