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A kind of ultra-high-purity carbon monoxide preparation device and process

A carbon monoxide and preparation device technology, applied in the direction of carbon monoxide, inorganic chemistry, chemical instruments and methods, etc., can solve the problems of unsatisfactory carbon monoxide gas purity, insufficient resource utilization, high production cost, etc., achieve good industrial application prospects, improve resource Efficiency and ease of operation

Active Publication Date: 2022-03-18
SHANGHAI RES INST OF CHEM IND +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, in the existing patented technology, the purity of the prepared carbon monoxide gas cannot meet the needs of modern VLSI. At the same time, the existing patented technology also has disadvantages such as high production cost, insufficient resource utilization, and inconvenient operation.

Method used

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  • A kind of ultra-high-purity carbon monoxide preparation device and process

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Effect test

Embodiment 1

[0048] In this embodiment, the ultra-high purity carbon monoxide preparation process and apparatus, such as figure 1 Indicated.

[0049]In this example, the ultra-high purification carbon monoxide preparation device includes a formic acid dehydration reaction device 6, a base washed tower, a low temperature cold trap 12, a deoxidation column 14, an adsorbed drying tower 16, a low temperature rectification tower 18, wherein specifically:

[0050] A formic acid dehydration reaction occurs in the formic acid dehydration reaction, produces a mixture of carbon monoxide, and a formic acid storage tank 2 is also attached to the formate of the formate before the formation of a mixture of carbon monoxide.

[0051] The alkali washed tower is used to remove the acidic impurity components in the mixed gas, the base wasolata includes the first base base washed tower 8 and the second alkali washing tower, which constitutes a two-stage base washing structure. In the two-stage alkali washing stru...

Embodiment 2

[0064] In this embodiment, the method step is the same as that of the first embodiment, and the operation parameters are implemented as follows: the feed speed of the feed pump is 220 kg / h; the second alkali washing tower uses 5.5% NaOH solution; the reaction of the deoxidation column The temperature is -185 ° C, atmospheric pressure; the operating temperature of the adsorption of the drying tower is 6 ° C, atmospheric pressure; the tower of the base washed tower is the stainless steel liner in the plastic, the tower is filled with acid and alkali-resistant plastic Ball Stacking filling; low temperature rectification tower theory level is 90, the top of the tower is 90 kPa (absolute pressure), the tower pressure drop 2.2 kPa, the top operating temperature is -194 ° C, the tower is -188 ° C.

Embodiment 3

[0066] In this embodiment, the method steps are the same as that of the first embodiment, and the operation parameters are implemented as follows: the feed pump conveyed feed speed is 250 kg / h; the second alkali washing tower uses 5.8% NaOH solution; the reaction of the deoxidation column The temperature is -190 ° C, atmospheric pressure; the operating temperature of the suction drying tower is 7 ° C, atmospheric pressure; the tower of the base washed tower is a stainless steel lining polypropylene plastic, and the tower is filled with acid and alkali-resistant plastic θ loop-resistant filler The low temperature rectification tower Theory is 95, the top of the top operation pressure is 85 kPa (absolute pressure), the tower pressure drop 2.5 kPa, the top operating temperature is -193 ° C, the tower is -185 ° C.

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Abstract

The invention relates to an ultra-high-purity carbon monoxide preparation device and process, comprising a formic acid dehydration reaction device, an alkali washing tower, a low-temperature cold trap, a deoxidation tower, an adsorption drying tower, and a low-temperature rectification tower in series in sequence, wherein the formic acid dehydration reaction device produces Formic acid dehydration reaction, the alkali washing tower is used to remove the acidic impurity components in the mixed gas; the cryogenic cold trap condenses and dehydrates the gas passing through the alkali washing tower; the deoxygenation tower deoxidizes the gas passing through the cryogenic cold trap; The low-temperature rectification tower rectifies and then purifies the gas passing through the adsorption drying tower, and an ultra-high-purity carbon monoxide product with a purity of not less than 99.9999% can be obtained in the bottom of the tower. Compared with the prior art, the overall technical process of the present invention has obtained high-quality electronic-grade carbon monoxide products with lower energy consumption and equipment investment, which can realize the promotion of industrialization; simultaneously obtain Na 2 SO 4 , NaHSO 4 By-products can effectively improve the resource utilization rate, save the preparation cost, and improve the economic benefits of the product.

Description

Technical field [0001] The present invention relates to high-purity carbon monoxide preparation, and more particularly to an ultra-high purity carbon monoxide preparation device and process. Background technique [0002] Carbon monoxide is an important organic chemical raw material, which can be used to prepare such as ammonia, photomics, alcohol, acid, anhydride, anhydride, anhydride, alkane, and olefin, all kinds of equalized reaction catalysts, and high purity nickel or the like. With the rapid development of the semiconductor and the electronics, high-purity carbon monoxide electrons are characterized by forming a low boiling carbonyl complex with a plurality of transition metals such as copper, molybdenum, tantalum, tungsten, and is widely used for plasma-assisted gas phase deposition cavity. Semi-conductive process such as sweeping, etching; in addition to this, high-purity carbon monoxide is also widely used in pharmaceutical intermediates, standard gas molding, carbon mon...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/40B01D53/86B01D53/78B01D53/50B01D53/40B01D53/26B01D53/04B01D53/00B01D3/14B01J19/18B01J19/00
CPCC01B32/40B01D53/78B01D53/502B01D53/8671B01D53/40B01D53/261B01D53/04B01D53/002B01J19/18B01D3/14B01J19/00B01D2251/304B01D2251/604B01D2257/104B01D2257/302C01B2210/0003C01B2210/0045C01B2210/0071Y02C20/40Y02P20/151Y02P70/10
Inventor 田叶盛李虎林谢宜桉黄志杰龙磊方华仁许博文王学莹
Owner SHANGHAI RES INST OF CHEM IND