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A kind of nanometer multi-layer coating and its preparation method and the cutter with nanometer multi-layer coating on the surface

A nano-multi-layer and nano-layer technology, which is applied in coating, metal material coating process, sputtering plating, etc., can solve the problems that hardness and thermal stability cannot be taken into account, and can not meet the requirements of high-speed cutting performance.

Active Publication Date: 2022-07-05
上海工具厂有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above-mentioned existing coatings still have the problem that hardness and thermal stability cannot be balanced, and cannot meet the performance requirements of high-speed cutting and dry cutting

Method used

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  • A kind of nanometer multi-layer coating and its preparation method and the cutter with nanometer multi-layer coating on the surface
  • A kind of nanometer multi-layer coating and its preparation method and the cutter with nanometer multi-layer coating on the surface
  • A kind of nanometer multi-layer coating and its preparation method and the cutter with nanometer multi-layer coating on the surface

Examples

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preparation example Construction

[0027] The present invention provides the preparation method of the nano-multilayer coating described in the above technical solution, comprising the following steps:

[0028] AlCrTiZrMo high-entropy alloy target and Cr alternately used in nitrogen and inert gas 2 O 3 Target, alternately cyclic magnetron sputtering deposition of (AlCrTiZrMo)N nanolayers and Cr on the substrate surface 2 O 3 nano-layers to obtain nano-multilayer coatings.

[0029]In the present invention, the substrate is preferably subjected to pretreatment before use, and the pretreatment preferably includes polishing, organic solvent washing, water washing, drying and vacuum ion cleaning performed in sequence. The present invention does not specifically limit the polishing method, and a polishing method well known to those skilled in the art may be used, such as mirror polishing. In the present invention, the organic solvent washing preferably includes anhydrous ethanol washing and acetone washing perfor...

Embodiment 1

[0043] (1) The substrate of the single crystal silicon wafer is subjected to mirror polishing treatment, and then ultrasonically cleaned with absolute ethanol, acetone and deionized water for 20 minutes under the condition of 30 kHz, and then dried, placed in a vacuum cleaning chamber, and evacuated to 6× 10 -4 After Pa, Ar was used as the ion source, and the vacuum degree was maintained at 4Pa. The high-speed steel substrate washed with deionized water was bombarded with intermediate frequency ions for 30min under the condition of 80W by radio frequency power supply, and the pretreated single crystal silicon wafer substrate was obtained.

[0044] (2) Place the pretreated single crystal silicon wafer substrate in a magnetron sputtering system, and alternately use AlCrTiZrMo high-entropy alloy targets with a purity of 99.99% and a diameter of 75 mm and Cr in nitrogen and an inert gas. 2 O 3 Target, alternately cyclic magnetron sputtering deposition of (AlCrTiZrMo)N nanolayers ...

Embodiment 2～5

[0049] The nano-multilayer coating was prepared according to the method of Example 1, and the preparation conditions of Examples 1 to 5 are shown in Table 1:

[0050] Preparation conditions of Examples 1 to 5 in Table 1

[0051]

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Abstract

The invention provides a nanometer multi-layer coating, a preparation method thereof, and a tool whose surface is coated with the nanometer multi-layer coating, belonging to the technical field of protective coatings. The nano-multilayer coating provided by the present invention includes (AlCrTiZrMo)N nano-layers and Cr layers alternately stacked on the surface of the substrate. 2 O 3 nanolayers. In the nano-multilayer coating provided by the present invention, (AlCrTiZrMo)N nano-layer and Cr 2 O 3 Coherent boundaries are formed between the nano-layers, which hinders the movement of dislocations, and the hardness of the nano-multilayer coating is high; because the modulation layer is Cr with low oxygen diffusion coefficient 2 O 3 The nano-layer makes the thermal stability of the nano-multilayer coating better than that of the (AlCrTiZrMo)N single-layer coating. The nano-multilayer coating provided by the invention has both high hardness and high thermal stability, can make up for the deficiencies in the use of traditional tool coatings, broaden the research scope of tool coatings, and meet the performance requirements of high-speed cutting and dry cutting.

Description

technical field [0001] The invention relates to the technical field of protective coatings, in particular to a nano-multi-layer coating, a preparation method thereof, and a tool coated with the nano-multi-layer coating on the surface. Background technique [0002] With the rapid development of the manufacturing industry, higher and higher requirements are placed on the surface properties of materials, which not only require high hardness, wear resistance and corrosion resistance, but also require them to perform in some harsh service conditions such as high temperature. good. Coating a layer of protective hard coating on the surface of the material is an economical and practical way to improve the surface performance of the material. As an important branch of the surface coating field, protective coating is used in machinery manufacturing, automobile industry, geological drilling , mold industry and other fields are widely used, especially in metal cutting. With the contin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/08
CPCC23C14/352C23C14/0036C23C14/0641C23C14/083
Inventor 孟漪陆红妹何佳王诗凯李伟陈立强
Owner 上海工具厂有限公司
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