High-conductivity high-elasticity palladium-based alloy, heat treatment process and application

A palladium-based alloy, high elasticity technology, applied in the direction of metal/alloy conductors, etc., can solve the problems of reducing device size, increasing processing capacity, high tolerance, etc.

Active Publication Date: 2020-12-11
昆明贵研新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is difficult to meet the continuous and rapid shrinking device size and increasing processing capacity in the field of semiconductor manufacturing, that is, a higher number of transistors per unit area and faster processing speed; at the same time, micro-motors and precision potentiometers are moving towards miniaturization and light weight , The trend of

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] (1) The metal raw material with a purity exceeding 99.99% is alloyed with 46% Pd, 38% Cu, 12% Ag, 3.5% Ru and 0.5% Ce in mass percent.

[0027] (2) The alloy ingredients with a good ratio are heated and smelted after being filled with high-purity argon in a vacuum high-frequency induction furnace, wherein the vacuum degree of the vacuum high-frequency induction furnace is 10 -2 Pa.

[0028] (3) After the alloy ingredients are completely melted, refine for 5 minutes, and suction cast into a water-cooled copper mold to obtain a round bar-shaped ingot, wherein the cooling water inlet temperature is 18°C, and the cooling water flow rate is 20L min -1 .

[0029] (4) After the round bar-shaped ingot is homogenized at 950°C for 8 hours, it is water quenched to room temperature and rolled. Annealing is performed when the rolling deformation amount is 10% and the total deformation amount is 75%. The annealing temperature is 850° C. and the annealing time is 30 minutes. When t...

Embodiment 2

[0034] (1) Using metal raw materials with a purity of more than 99.99%, alloying is carried out by mass percentage of 49.5% Pd, 35% Cu, 10% Ag, 4.5% Ru, 0.5% La and 0.5% Ga.

[0035] (2) The alloy ingredients with a good ratio are heated and smelted after being filled with high-purity argon in a vacuum high-frequency induction furnace, wherein the vacuum degree of the vacuum high-frequency induction furnace is 10 -2 Pa.

[0036] (3) After the alloy ingredients are completely melted, refine for 5 minutes, and suction cast into a water-cooled copper mold to obtain a round bar-shaped ingot, wherein the cooling water inlet temperature is 18°C, and the cooling water flow rate is 20L min -1 .

[0037](4) After the round bar-shaped ingot is homogenized at 950°C for 8 hours, it is water quenched to room temperature and rolled. Annealing is performed when the rolling deformation amount is 10% and the total deformation amount is 75%. The annealing temperature is 850° C. and the anneal...

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Abstract

The invention discloses a high-conductivity high-elasticity palladium-based alloy, a heat treatment process and application. The palladium-based alloy comprises, by mass, 40-60 wt.% of Pd, 25-45 wt.%of Cu, 5-15 wt.% of Ag, 1.5-5 wt.% of Ru and 0-2.0 wt.% of modified elements, wherein the modified elements are one or two of La, Ce, Gd, Y, Ga, Zr and B. The heat treatment process comprises the steps of carrying out burdening, carrying out smelting, carrying out casting, carrying out rolling, carrying out annealing, carrying out drawing and carrying out intermediate annealing, and after the intermediate annealing step is completed, aging solution strengthening treatment needs to be carried out on a prepared alloy wire. The conductivity of the palladium-based alloy ranges from 15% to 25%IACS,the elasticity modulus ranges from 115 GPa to 125GPa, the hardness Hv0.1 ranges from 360 to 460, the resistance temperature coefficient ranges from 2.0 to 4.0x10<-4>K<-1>, the yield strength ranges from 1075 MPa to 1125MPa, and the ductility ranges from 2% to 10%. The high-conductivity high-elasticity palladium-based alloy can be used for a micromotor electric brush wire, a potentiometer electricbrush wire and a semiconductor test probe, wherein the probe can be a Cobra probe or a cantilever type probe or a vertical type probe or a spring type probe.

Description

technical field [0001] The invention relates to the technical field of electrical contact metal materials, in particular to a high-conductivity and high-elasticity palladium-based alloy, heat treatment process and application. Background technique [0002] Micro motors, elastic brushes for precision potentiometers, semiconductor test probes and potentiometric sensors require alloys to have both excellent electrical contact performance, high elasticity and wear resistance, and precious metal alloys can meet these special requirements. Therefore, multi-component alloys containing precious metal elements are widely used all over the world, the most famous of which is Palliney TM 7. A six-element alloy whose composition is 35Pd-10Au-10Pt-30Ag-14Cu-1Znwt.%. However, the conductivity of this alloy is very low, about 5.5% IACS. It is difficult to meet the continuous and rapid shrinking device size and increasing processing capacity in the field of semiconductor manufacturing, tha...

Claims

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Application Information

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IPC IPC(8): C22C5/04C22F1/14H01B1/02
CPCC22C5/04C22F1/14H01B1/02
Inventor 刘满门陈家林裴洪营崔浩谢明阳岸恒王钊王松李爱坤王塞北胡洁琼杨有才陈永泰张吉明陈松方继恒
Owner 昆明贵研新材料科技有限公司
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