Stray light deflector, optical chip and manufacturing method thereof

Abstract

The invention discloses a stray light deflector, an optical chip and a manufacturing method thereof. According to the invention, a groove is formed in a chip based on a gray etching mode, and a metalreflecting layer capable of reflecting stray light with different wavelengths to the external space is plated on the groove wall of the groove to form the stray light deflector. The stray light with different wavelengths, different modes and different angles of the optical chip can be effectively removed, the process steps are simple, the layout is flexible, and the cost is low.

Description

technical field [0001] The invention relates to an optical waveguide device, in particular to a stray light deflector, an optical chip and a manufacturing method thereof. Background technique [0002] Optical chip, photonic chip or integrated optical waveguide chip is one of the key device structures in 5G optical communication, optical computing and other fields. Lasers, optical fibers, and optical detectors can directly interact with optical chips through different coupling methods. Common coupling methods such as figure 1 As shown, there are two types: end-face coupling and grating coupling. The signal light source is output from the laser 01 or the optical fiber 02, and enters the optical chip circuit 05 through an input waveguide 04 in the optical chip 03 for optical signal processing. After the optical signal is processed, it is transmitted to the optical detector 07 through the port of the output waveguide 06 middle. [0003] In the interactive processing process ...

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Problems solved by technology

[0006] Chinese patent, publication number CN1290354A, titled a method for absorbing stray light in an integrated optical circuit, this patent adopts the method of setting doped regions in the chip to absorb stray light, but this method sets the doped region in the optical chip process flow complex and expensive

[0010] From the above description, it can be seen that wavelength selectivity, mode selectivity and direction selectivity will cause stray light of some wavelengths, some stray light of non-set modes and some stray light of non-set angles to not be well deflected or filtered. Eliminate, therefore, the realization of wide-band or multi-mode or multi-directional deflector structure requires multi-level cascading for coverage, which will inevitably lead to large deflector structure size, occupying the space of the chip functional area, or in chip functions with limited space High-performance photonic crystal diverters cannot be placed in the area

[0011] 2. In order to ensure that the reflection unit can reflect stray light of various wavelengths, the reflection unit needs strict etching line width and size (according to the above-mentioned photonic crystal band gap analysis, the etching line width and size are related to the reflection wavelength. close relationship), which poses a major process challenge

Filling defects will change the refractive index of the filled area, further affecting the performance of the reflective unit, including affecting the working wavelength, reflection efficiency

[0012] 3. In the above method, after the stray light is redirected, the residual light will still be trapped in the core layer of the waveguide for propagation, and it is likely to be transmitted back to the laser circuit as a return loss component (or transmitted to the detector as a noise component), which is Designers cannot predict

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