Micro-milling burr inhibition method applied to folded waveguide slow wave structure

A technology of slow-wave structure and folded waveguide, which is applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using liquids, etc. Surface quality and other issues, to achieve the effect of satisfying high machined surface quality, suppressing the generation of burrs, and ensuring depth consistency

Inactive Publication Date: 2021-01-29
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the geometric shape of the slow-wave structure is complex, and the dispersed oxygen-free copper composite material with excellent plasticity and ductility is used as the workpiece material. Will deteriorate the quality of the machined surface and have a significant negative effect on the effective propagation of electromagnetic waves and electron beams

Method used

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  • Micro-milling burr inhibition method applied to folded waveguide slow wave structure
  • Micro-milling burr inhibition method applied to folded waveguide slow wave structure
  • Micro-milling burr inhibition method applied to folded waveguide slow wave structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] A micro-milling burr suppression method applied to folded waveguide slow-wave structures for processing such as figure 1 The slow wave structure shown. The overall slow wave structure is a cuboid of 48mm*10mm*10mm. S-shaped grooves 2 and straight grooves 1 that penetrate each other are distributed on the upper surface of the cuboid, and the two meet to form an island 5 . Among them, the S-shaped groove has a total of 75 cycles, the aspect ratio of the S-shaped groove reaches 255 μm / 100 μm, the island width is 48 μm, the span is 22.2 mm, and the straight groove width is 140 μm. The material of the slow wave structure is selected to be doped with Al with a volume fraction of 0.5% to 1.2% and a particle size of 50 to 100nm. 2 o 3 Granular dispersed oxygen-free copper. The dimensional accuracy of the processed slow wave structure is required to be better than ±2μm, and the surface roughness Ra should be better than 60nm.

[0063] In view of the complexity of the slow w...

Embodiment 2

[0067] A micro-milling burr suppression method applied to folded waveguide slow-wave structures for processing such as figure 1 The slow wave structure shown. The overall slow wave structure is a cuboid of 48mm*10mm*10mm. S-shaped grooves 2 and straight grooves 1 that penetrate each other are distributed on the upper surface of the cuboid, and the two meet to form an island. Among them, the S-shaped groove has a total of 75 cycles, the aspect ratio of the S-shaped groove reaches 255 μm / 100 μm, the island width is 48 μm, the span is 22.2 mm, and the straight groove width is 140 μm. The material of the slow wave structure is selected to be doped with Al with a volume fraction of 0.5% to 1.2% and a particle size of 50 to 100nm. 2 o 3 For the dispersed oxygen-free copper particles, the volume fraction of the dispersed oxygen-free copper doped in this embodiment is 1.1%. The dimensional accuracy of the processed slow wave structure is required to be better than ±2μm, and the su...

Embodiment 3

[0121] Compared with Embodiment 2, this embodiment has the same basic requirements for the processed slow wave structure.

[0122] Compared with Example 2, the process steps of this embodiment omit step B2, and the process methods of other steps are the same, and the cutting parameters are slightly adjusted within the selected range. The experimental results prove that after adopting the process steps of this example, the dimensional accuracy and machined surface quality of the workpiece are measured by using the VHX-1000 ultra-depth optical microscope and the ZYGO white light interferometer. Within the range, the surface roughness Ra is less than 60nm, and the PMMA auxiliary support material filled in the straight groove has a good overall suppression effect on micro-milling burrs. Since the PMMA auxiliary support material is not coated on the upper surface, there are a small amount of small-sized burrs at the top of the groove. within the acceptable range.

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Abstract

The invention relates to a micro-milling burr inhibition method applied to a folded waveguide slow wave structure. The method comprises the steps that after a straight groove in the slow wave structure is generated through micro-milling machining, a cavity of the straight groove is filled with PMMA colloid; after the PMMA colloid is cured, micro-milling machining of an S-shaped groove in the slowwave structure is carried out; and after a workpiece is machined, the workpiece is placed in an organic solvent to dissolve a PMMA curing layer, and cleaning and drying are carried out, wherein the PMMA colloid is prepared by uniformly mixing polymethyl methacrylate and an acrylic curing agent according to the mass ratio of (1-1.4): 1. According to the micro-milling burr inhibition method appliedto the folded waveguide slow wave structure, the machined cavity of the straight groove is filled with the PMMA colloid in a coated mode to serve as an auxiliary supporting material, the PMMA colloidis used for enhancing the plastic deformation resistance of the boundary of a dispersed oxygen-free copper material in the cutting process, and then formation of burrs at the groove top, the groove shoulder and the island root is inhibited.

Description

technical field [0001] The invention relates to the technical field of ultra-precision micro-milling processing, in particular to a micro-milling burr suppression method applied to a folded waveguide slow-wave structure. Background technique [0002] The slow-wave structure is the core part of the traveling wave tube amplifier. like figure 1 The shown slow-wave structure of the folded waveguide in the terahertz frequency band is a cuboid structure with a length of 48mm, a width of 10mm, and a height of 10mm. A straight band-shaped electron injection channel (hereinafter referred to as a straight groove) is machined along the central axis of the length direction of the upper surface of the cuboid, and one end of the straight groove is set as the inlet and the other end is set as the outlet. An S-shaped waveguide for transmitting terahertz waves (hereinafter referred to as S-shaped groove) is machined within the set distance between the entrance and the outlet of the straigh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23C3/00B23C9/00B23Q11/00B23Q17/20B23Q17/09B08B3/12
CPCB23C3/00B23C9/00B23Q11/0042B23Q17/20B23Q17/09B08B3/12
Inventor 吴春亚李曦光陈明君吴佳昊刘畅侯博韩鹏宇
Owner HARBIN INST OF TECH
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