Method for welding magnesium oxide target to back plate

Abstract

The invention provides a method for welding a magnesium oxide target to a back plate, and relates to the field of sputtering targets. The method comprises the steps of performing cleaning and sand blasting treatment on a target welding face and a back plate welding face; and pouring molten brazing filler metal onto the target welding face and the back plate welding face obtained after sand blasting treatment, and further enabling the brazing filler metal to infiltrate the target welding face and the back plate welding face by using ultrasonic waves to realize welding. According to the method,the welding bonding strength of the brazing filler metal and the welding faces is improved by adding the sand blasting treatment process on the welding faces, the welding quality is enhanced, the method is easy and convenient to operate, and the welding rate can reach 99% or above.

Description

technical field

[0001] The invention belongs to the field of target material manufacture, and in particular relates to a magnesium oxide target material welding method. Background technique

[0002] Magnesium oxide targets are widely used in integrated circuits, flat panel displays, solar energy and other fields because of their high temperature stability, high dielectric constant, low dielectric loss and transparency to visible light. The magnesium oxide target needs to be connected with the metal back plate to form a target component, which is assembled together on the sputtering base and used as a cathode. The metal back plate plays the role of electrical and thermal conductivity and fixed support. During the sputtering process, the magnesium oxide target is bombarded by high-energy ions and heats up. If the welding bonding strength between the target and the back plate is low, it will cause the target to deform, crack, or even fall off the back plate under heated conditi...

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