Magnetron sputtering device for coating film on inner wall of pipe with large length-diameter ratio

Abstract

The invention discloses a magnetron sputtering device for coating a film on the inner wall of a pipe with a large length-diameter ratio. The magnetron sputtering device comprises a heating system for heating the pipe with the large length-diameter ratio, a vacuum end adapter and a vacuumizing system connected with one end of the pipe with the large length-diameter ratio, a power supply end adapter and a high-power pulse power supply connected with the other end of the pipe with the large-length-diameter-ratio, and a hollow pipe penetrating through the vacuum end adapter, the pipe with the large-length-diameter ratio and the power supply end adapter and located on the central axis of the vacuum end adapter, the large-length-diameter-ratio pipe and the power supply end adapter, a single or multiple annular target systems and a cooling water system, wherein fine holes are evenly distributed in the hollow pipe; the annular target systems are arranged on the hollow pipe in a sleeving manner and can move along the hollow pipe; and the cooling water system is connected with the annular target systems. An annular target material moves back and forth in a pipe fitting along a center shaft to realize uniform film coating of the inner walls of the pipe fittings with different lengths, the target material can be selected from a metal material and a non-metal material, and multiple target materials can be coated with multiple layers of films through cooperative coating of several target systems, and the problem that an existing pipe fitting inner wall coating technology can only achieve single-component film coating is solved.

Description

technical field [0001] The invention belongs to the technical field of plating by vacuum evaporation, sputtering or ion implantation of coating forming materials, and in particular relates to a magnetron sputtering device for coating the inner wall of a tube with a large aspect ratio Compared with the method of coating the inner wall of the tube. Background technique [0002] Large length-to-diameter ratio pipe fittings have been widely used in industrial piping systems in various industries such as oil refining, chemical industry, nuclear power, thermal power, ships, and transportation. During application, factors such as chemical corrosion, thermal corrosion, friction and oxidation can significantly reduce the service life of these fittings. Therefore, a large number of large aspect ratio pipe fittings need to be modified on the surface of the inner wall to make them have properties such as wear resistance, chemical corrosion resistance, heat corrosion resistance, and oxi...

AI Technical Summary

Problems solved by technology

[0003] When the electroplating method is used to coat the inner wall of the pipe with a large aspect ratio, a large amount of toxic solution will be used, and a large amount of waste liquid will be generated at the same time

In addition, the electroplating method can only prepare metal or alloy coatings, and cannot prepare non-metallic coatings

When chemical vapor deposition is used to coat the inner wall of a pipe with a large aspect ratio, since the pipe is used as a cavity, the gas raw material can only enter from one end, the gas concentration at the inlet end is high, and the gas concentration at the exhaust end is small, which will lead to deposition in the pipe uneven film

The existing technical scheme of using magnetron sputtering technology to coat the inside of the pipe uses a cylindrical target with the same length as the pipe. For pipes with a length greater than 5 meters, this technology is used to prepare super long targets There are challenges in manufacturing, and in practical applications, it will be necessary to coat several pipes with different lengths. Using this technology requires customized targets for pipes with different lengths, which greatly increases the cost.

At the same time, this method cannot change the composition of the coating and prepare a multi-layer composite coating

For example, the equipment disclosed in the Chinese patent (CN109735812A) uses a long cylindrical target. During the process of replacing the tube, the target is exposed to the environment, and the target surface is oxidized or polluted to a certain extent. The device cannot perform pre-sputtering. Cleaning the target will seriously affect the coating quality

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