Magnetron sputtering device for coating film on inner wall of pipe with large length-diameter ratio

A magnetron sputtering device and a technology with a large aspect ratio, which is applied in sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problem of uneven film, non-metallic coating, large amount of toxic solution, etc. question

Active Publication Date: 2021-04-20
WUHAN UNIV OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] When the electroplating method is used to coat the inner wall of the pipe with a large aspect ratio, a large amount of toxic solution will be used, and a large amount of waste liquid will be generated at the same time
In addition, the electroplating method can only prepare metal or alloy coatings, and cannot prepare non-metallic coatings
When chemical vapor deposition is used to coat the inner wall of a pipe with a large aspect ratio, since the pipe is used as a cavity, the gas raw material can only enter from one end, the gas concentration at the inlet end is high, and the gas concentration at the exhaust end is small, which will lead to deposition in the pipe uneven film
The existing technical scheme of using magnetron sputtering technology to coat the inside of the pipe uses a cylindrical target with the same length as ...

Method used

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  • Magnetron sputtering device for coating film on inner wall of pipe with large length-diameter ratio
  • Magnetron sputtering device for coating film on inner wall of pipe with large length-diameter ratio
  • Magnetron sputtering device for coating film on inner wall of pipe with large length-diameter ratio

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Experimental program
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Effect test

Embodiment 1

[0047] The method of coating the inner wall of the large aspect ratio tube by using the above-mentioned magnetron sputtering device is as follows:

[0048] Coating the inner wall of the pipe fittings with an inner diameter of 40cm and a length of 600cm, and degreasing and decontaminating the inner wall of the pipe fittings before assembly. The target is a metal vanadium target with an outer diameter of 26cm and a purity of 99.99wt%. The axial length of the target along the hollow tube is 15cm, the thickness of the target (difference between inner and outer diameters) is 4cm, and the distance between the target surface and the inner wall of the tube is 7cm. The distance between the pores on the hollow tube is 4cm, and the diameter of the pores is 0.2cm. After the assembly is complete, pump the inside of the fitting to 1×10 -3 Pa background vacuum, turn on the medium frequency induction heating power supply, and heat the tube to 150°C. Argon gas (purity 99.999%) was introduced...

Embodiment 2

[0051] The method of coating the inner wall of a large aspect ratio tube by using a magnetron sputtering device is as follows:

[0052] Multi-layer composite coating is applied to the inner wall of the pipe fittings with an inner diameter of 60cm and a length of 800cm. Before assembly, the inner wall of the pipe fittings is degreased and decontaminated. The target material adopts metal Ti target, TiCr target and TiAl target with an outer diameter of 40cm and a purity of 99.99wt%. The inner walls are 10cm apart. The distance between the pores on the hollow tube is 4cm, and the diameter of the pores is 0.2cm. After assembly, pump down the deposition chamber to 1 x 10 -3 Pa background vacuum degree, turn on the medium frequency induction heating power supply, and heat the pipe fittings to 200°C. Introduce argon gas (purity 99.999%), set the flow rate of argon gas to 100 sccm, and adjust the deposition pressure to 0.4Pa, move the target to the adapter of the power supply end fo...

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Abstract

The invention discloses a magnetron sputtering device for coating a film on the inner wall of a pipe with a large length-diameter ratio. The magnetron sputtering device comprises a heating system for heating the pipe with the large length-diameter ratio, a vacuum end adapter and a vacuumizing system connected with one end of the pipe with the large length-diameter ratio, a power supply end adapter and a high-power pulse power supply connected with the other end of the pipe with the large-length-diameter-ratio, and a hollow pipe penetrating through the vacuum end adapter, the pipe with the large-length-diameter ratio and the power supply end adapter and located on the central axis of the vacuum end adapter, the large-length-diameter-ratio pipe and the power supply end adapter, a single or multiple annular target systems and a cooling water system, wherein fine holes are evenly distributed in the hollow pipe; the annular target systems are arranged on the hollow pipe in a sleeving manner and can move along the hollow pipe; and the cooling water system is connected with the annular target systems. An annular target material moves back and forth in a pipe fitting along a center shaft to realize uniform film coating of the inner walls of the pipe fittings with different lengths, the target material can be selected from a metal material and a non-metal material, and multiple target materials can be coated with multiple layers of films through cooperative coating of several target systems, and the problem that an existing pipe fitting inner wall coating technology can only achieve single-component film coating is solved.

Description

technical field [0001] The invention belongs to the technical field of plating by vacuum evaporation, sputtering or ion implantation of coating forming materials, and in particular relates to a magnetron sputtering device for coating the inner wall of a tube with a large aspect ratio Compared with the method of coating the inner wall of the tube. Background technique [0002] Large length-to-diameter ratio pipe fittings have been widely used in industrial piping systems in various industries such as oil refining, chemical industry, nuclear power, thermal power, ships, and transportation. During application, factors such as chemical corrosion, thermal corrosion, friction and oxidation can significantly reduce the service life of these fittings. Therefore, a large number of large aspect ratio pipe fittings need to be modified on the surface of the inner wall to make them have properties such as wear resistance, chemical corrosion resistance, heat corrosion resistance, and oxi...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/56C23C14/04
CPCY02E30/30
Inventor 章嵩涂溶王传彬沈强张联盟李志荣李迎春
Owner WUHAN UNIV OF TECH
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