Method for screening and matching insulating and heat-insulating material and nano-crystalline metal material in nano current channel layer
A technology of current channel and thermal insulation material, applied in the field of phase change storage, can solve the problems of high process process, high process cost and difficulty
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Embodiment 1
[0086] According to the first embodiment of the present invention, a cross-sectional view of an exemplary structure of a phase change memory having a nano-current channel layer to figure 2 Shows. Bottom electrode 10 is formed on SiO 2 On the substrate, the material of the bottom electrode 10 is selected from W, Pt, Au, Al, Cu, Ti, Ta and other metal materials and conductive materials of their alloys. The nano-current channel 20 is formed on the bottom electrode 10. The nano-current channel 20 is composed of insulating and heat-insulating material 22 and conductive nano-crystal grains 21 embedded in the middle of the insulating and heat-insulating material layer. The thickness of the nano-current channel layer 20 is 1 nm˜30 nm. The size of the conductive nanoparticles in the insulating layer is 1 nm˜30 nm, and the size of the conductive nanoparticles 21 in the direction perpendicular to the thin film is not less than the thickness of the nano current channel layer 20 . Compa...
Embodiment 2
[0089] According to the second embodiment of the present invention, finite element simulation is performed on the writing process of the phase-change memory structure with the nano-current channel layer and the conventional phase-change memory structure.
[0090] This simulation uses the simplest three-layer phase-change memory cell structure in Example 1. The material parameters used in the simulation are listed in Table 1 (the thermal and electrical parameters of the specific materials used in the finite element analysis). The upper and lower electrode materials of the two unit structures are Pt, and the insulating layer material is SiO 2 And the phase change layer material is Ge 2 Sb 2 Te 5 , the thickness of the upper and lower electrodes, the insulating layer, and the phase change layer are all 100 nm, and the diameter of the unit device is 100 nm. In the structure with the nano-current channel layer, the thickness of the nano-current channel layer is set to 5 nm, and t...
Embodiment 3
[0095] According to the third embodiment of the present invention, the manufacturing process of the T-type phase change memory cell containing the nano-current channel layer is as follows:
[0096] (1) Select SiO 2 / Si(100) substrate, the SiO 2 / Si(100) substrate was ultrasonicated with 40W power in acetone solution for 15 minutes to clean the surface, dust particles and organic impurities, and then rinsed with deionized water;
[0097] (2) Ultrasound the treated substrate with a power of 40w for 15 minutes in an ethanol solution, rinse with deionized water, and dry the surface and back of the substrate with high-purity N2 gas to obtain a substrate to be sputtered.
[0098] (3) As shown in FIG. 3(a), the bottom electrode 10 is grown on the substrate 00 using a magnetron sputtering method, and the bottom electrode 10 is made of Pt material, and high-purity argon gas is introduced as the sputtering gas during preparation, The sputtering gas pressure is 0.5 Pa, the power supply...
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