Laser texture bionic capacitive flexible pressure sensor and preparation method thereof

Abstract

The invention discloses a laser texture bionic capacitive flexible pressure sensor and a preparation method thereof, which belong to the field of flexible pressure sensors. The bionic capacitive flexible pressure sensor sequentially comprises an upper electrode flexible substrate, an upper electrode conductive layer, a flexible dielectric layer and a lower electrode film from top to bottom, wherein the upper electrode conductive layer is made of a spongy loose porous structure conductive material, and an A surface of the flexible dielectric layer is an integrated bionic butterfly scale laminated structure and a bionic moth eye structure array; the B surface of the flexible dielectric layer is a micropore structure array, the A surface of the flexible dielectric layer is arranged above and the B surface is arranged below in sensor assembly. The two bionic structures are textured through laser, the sensitivity and the linear range of the pressure sensor are effectively improved, the preparation method is simple, the template is controllable, the processing speed is high, the repeatability is good, the template can be repeatedly used, the sensor sensitivity is high, the linear range is wide, and the detection limit is low.

Description

technical field [0001] The invention belongs to the field of flexible pressure sensors, in particular to a laser texture bionic capacitive flexible pressure sensor and a preparation method thereof. Background technique [0002] In recent years, with the rapid development of flexible electronic materials and sensing technologies, flexible sensors have become one of the main research hotspots in the fields of wearable devices, robot skins, and smart homes. The flexible pressure sensor is a flexible electronic device that converts the external pressure stimulus into an electrical signal in the form of signal conduction, and reflects the magnitude of the external pressure through the response signal, and is widely used in intelligent prosthetics because of its good flexibility and excellent pressure response performance. , human-machine interface, medical diagnosis and sports behavior monitoring, etc. [0003] According to different response characteristics, flexible pressure s...

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Problems solved by technology

However, the traditional microstructure capacitive flexible pressure sensor has the disadvantages of limited sensitivity improvement of microstructure, small response range of a single structure, complex preparation method, time-consuming template optimization and preparation, etc., it is difficult to quickly design and modify the template and quickly prepare microstructure capacitance flexible pressure sensor

[0004] Inspired by the unique structure of natural organisms, researchers have studied bionic structure flexible pressure sensors, and prepared bionic microstructure flexible pressure sensors from the unique surface microstructures of roses, lotus leaves and golden elm leaves through molding and other processes However, due to the limited performance improvement of a single biomimetic structure, there are also disadvantages such as the template is limited by the biological template, it is difficult to combine multiple biomimetic structures, and the preparation process is complicated.

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