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A laser-textured bionic capacitive flexible pressure sensor and its preparation method

A pressure sensor and capacitive technology, applied in the field of laser textured bionic capacitive flexible pressure sensor and its preparation, can solve the problem that it is difficult to realize rapid design and modification of templates and quickly prepare micro-structure capacitive flexible pressure sensors, and templates are difficult to compound a variety of Biomimetic structure, limited improvement of bionic structure performance, etc., to achieve the effect of easy batch preparation, improved measurement linear range, and expanded measurement linear range

Active Publication Date: 2022-02-08
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional microstructure capacitive flexible pressure sensor has the disadvantages of limited sensitivity improvement of microstructure, small response range of a single structure, complex preparation method, time-consuming template optimization and preparation, etc., it is difficult to quickly design and modify the template and quickly prepare microstructure capacitance flexible pressure sensor
[0004] Inspired by the unique structure of natural organisms, researchers have studied bionic structure flexible pressure sensors, and prepared bionic microstructure flexible pressure sensors from the unique surface microstructures of roses, lotus leaves and golden elm leaves through molding and other processes However, due to the limited performance improvement of a single biomimetic structure, there are also disadvantages such as the template is limited by the biological template, it is difficult to combine multiple biomimetic structures, and the preparation process is complicated.

Method used

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  • A laser-textured bionic capacitive flexible pressure sensor and its preparation method
  • A laser-textured bionic capacitive flexible pressure sensor and its preparation method
  • A laser-textured bionic capacitive flexible pressure sensor and its preparation method

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Embodiment 1

[0037] This embodiment provides a laser-textured bionic capacitive flexible pressure sensor, including a plurality of bionic butterfly scale laminated structures and bionic moth-eye structures, such as figure 1 As shown, in the schematic diagram of the laser texture bionic capacitive flexible pressure sensor, 1 is the upper electrode flexible substrate (1), 2 is the upper electrode conductive layer (2), 3 is the flexible dielectric layer (3), and 4 is the lower electrode A thin film (4), the upper electrode conductive layer (2) is a spongy porous structure conductive material, and the A side of the flexible dielectric layer (3) is an integrated bionic butterfly scale stacked structure array and a bionic moth-eye structure array; the The surface B of the flexible dielectric layer (3) is a microporous structure array.

Embodiment 2

[0039] This embodiment provides a preparation method of the laser-textured bionic capacitive flexible pressure sensor described in Embodiment 1, comprising the following steps:

[0040] (1) Pretreatment: select polydimethylsiloxane (PDMS) as the template material, prepare PDMS solution: mix the main agent and curing agent in a beaker according to the weight ratio of 10:1, stir with a glass rod for 15 minutes, put Vacuum in a vacuum box for 15 minutes to remove air bubbles for later use;

[0041] (2) Preparation of a flexible dielectric layer (3): Take an appropriate amount of PDMS mixed solution and spin-coat it on a smooth petri dish, and form a smooth film after curing. Using CO 2 The laser textured the surface of the smooth film to integrate the bionic butterfly scale structure and the bionic moth-eye structure template. The processing process is as follows: figure 2As shown, the three-dimensional schematic diagram of the integrated bionic butterfly scale structure and b...

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Abstract

A laser texture bionic capacitive flexible pressure sensor and a preparation method thereof belong to the field of flexible pressure sensors. The bionic capacitive flexible pressure sensor includes an upper electrode flexible base, an upper electrode conductive layer, a flexible dielectric layer and a lower electrode film from top to bottom. The upper electrode conductive layer is a spongy porous porous structure conductive material, and the flexible dielectric layer The A side of the sensor is an integrated bionic butterfly scale laminated structure and a bionic moth-eye structure array; the B side of the flexible dielectric layer is a micropore structure array, and the A side of the flexible dielectric layer is on the top and the B side is on the bottom in the sensor assembly. The two bionic structures are textured by laser to effectively improve the sensitivity and linear range of the pressure sensor. The preparation method is simple, the template is controllable, the processing speed is fast, the repeatability is good, the template can be reused, the sensor sensitivity is high, and the linear range is wide. Low detection limit.

Description

technical field [0001] The invention belongs to the field of flexible pressure sensors, in particular to a laser texture bionic capacitive flexible pressure sensor and a preparation method thereof. Background technique [0002] In recent years, with the rapid development of flexible electronic materials and sensing technologies, flexible sensors have become one of the main research hotspots in the fields of wearable devices, robot skins, and smart homes. The flexible pressure sensor is a flexible electronic device that converts the external pressure stimulus into an electrical signal in the form of signal conduction, and reflects the magnitude of the external pressure through the response signal, and is widely used in intelligent prosthetics because of its good flexibility and excellent pressure response performance. , human-machine interface, medical diagnosis and sports behavior monitoring, etc. [0003] According to different response characteristics, flexible pressure s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/14
CPCG01L1/148
Inventor 颜黄苹王子俊陈子露
Owner XIAMEN UNIV
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