The invention discloses a
laser texture bionic capacitive flexible
pressure sensor and a preparation method thereof, which belong to the field of flexible pressure sensors. The bionic capacitive flexible
pressure sensor sequentially comprises an upper
electrode flexible substrate, an upper
electrode conductive layer, a flexible
dielectric layer and a lower
electrode film from top to bottom, wherein the upper electrode conductive layer is made of a spongy loose porous structure conductive material, and an A surface of the flexible
dielectric layer is an integrated bionic butterfly scale laminated structure and a bionic moth
eye structure array; the B surface of the flexible
dielectric layer is a micropore structure array, the A surface of the flexible
dielectric layer is arranged above and the B surface is arranged below in sensor
assembly. The two bionic structures are textured through
laser, the sensitivity and the
linear range of the
pressure sensor are effectively improved, the preparation method is simple, the template is controllable, the
processing speed is high, the
repeatability is good, the template can be repeatedly used, the sensor sensitivity is high, the
linear range is wide, and the
detection limit is low.