Metal reinforced porous diamond film and preparation method thereof

A diamond film and metal strengthening technology, which is applied in metal material coating process, gaseous chemical plating, ion implantation plating, etc., can solve the problems of micro-cracks and small cavities, high equipment cost, and defect expansion, etc., to improve surface adsorption Performance, method simplicity, combined strength-enhancing effects
CN113186510AActive Publication Date: 2021-07-30KUNMING UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
KUNMING UNIV OF SCI & TECH
Publication Date
2021-07-30

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Abstract

The invention discloses a metal reinforced porous diamond film and a preparation method thereof, and belongs to the technical field of diamond films. According to the metal reinforced porous diamond film and the preparation method thereof, a nano or micron-sized diamond film is deposited by adopting a microwave chemical vapor deposition technology, a layer of oxide is sputtered on the surface of the diamond film by adopting a magnetron sputtering method, then the diamond film is put into a microwave chemical vapor deposition system, the diamond film is etched by using hydrogen argon or hydrogen plasma, then the diamond film is put into a sodium nitrate solution to be heated, the diamond film is further etched, non-diamond phases and metal nanoparticles generated during plasma etching are removed, platinum, gold and other precious metal elementary substances are subjected to magnetron sputtering again, finally, the diamond film is put into the microwave chemical vapor deposition system to disperse precious metal, and the metal reinforced porous diamond film with a good shape is obtained. The preparation method is simple and easy to operate, the surface of the prepared diamond film is of a porous structure, the filled precious metal is a good catalyst, and the diamond film has wide application prospects in the fields of chemical catalysis, sensors and the like.
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Description

technical field

[0001] The invention relates to the technical field of diamond membranes, in particular to a metal-reinforced porous diamond membrane and a preparation method thereof. Background technique

[0002] The unique structure of diamond makes it have many excellent physical and chemical properties such as high hardness, good stability, and strong thermal conductivity. It has good application prospects in many high-tech fields such as energy, catalysis, sensors, aerospace, and precision machining. However, the content of natural diamond in nature is very small, and it is often in the form of a single particle, which is difficult to process and expensive, and is mostly used in luxury goods such as jewelry. At present, high-tech fields have special requirements for the dimension and microstructure of diamond materials. For example, the window materials of aerospace vehicles and high-power lasers require high-quality two-dimensional diamond films, and fields such as ene...

Claims

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