Low-loss integrated bent optical waveguide and design method thereof

Abstract

The invention discloses a low-loss integrated bent optical waveguide and a design method thereof, and belongs to the field of integrated optics. The difference between the design method and the existing width-invariable Bezier curve waveguide is that the width-invariable Bezier curve waveguide only has one optimization parameter and only optimizes the center position of the waveguide; the boundary of the waveguide is optimized and optimization has four optimization parameters so that the bent optical waveguide with the variable width is generated, the design flexibility is greatly improved, and the bending loss is remarkably reduced. The design method can be widely applied to different optical integrated material systems such as silicon, lithium niobate, silicon nitride and gallium arsenide, and development of the integrated optical technology is promoted.

Description

technical field [0001] The invention belongs to the field of integrated optics, in particular to an integrated curved optical waveguide and a design method thereof. Background technique [0002] With the increasing demand for data throughput in the fields of large-capacity communication, artificial intelligence, and high-speed computing, traditional electrical interconnection faces problems such as large signal delay, small bandwidth, and serious crosstalk, while integrated optics uses on-chip optical interconnection, It has the advantages of large bandwidth, low delay, and anti-interference, and can effectively solve the bottleneck problem of electrical interconnection. At present, integrated optics has played an important role in military, sensing and medical fields. [0003] Integrated optical technology has realized lasers, modulators, detectors, wavelength division multiplexing / demultiplexing in different material systems such as III-V indium phosphide, gallium arsenid...

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Problems solved by technology

[0008] 2. Photonic crystals have a certain transmission bandwidth. However, due to the resonance effect of optical signals propagating in photonic crystals, the transmission bandwidth will be narrowed;

[0009] 3. The photonic crystal is composed of multiple periods of metal pillars, so the chip area is larger

[0011] 1. The preparation process is complicated, requiring one more photolithography step and wet etching process than conventional waveguides;

[0012] 2. The reflector is at the interface between air and silicon material, which is easily affected by the environment, resulting in poor device stability, and the interface is easily polluted during wet etching, which causes scattering loss and increases bending loss;

However, due to the strong dependence of wet etching on both materials and crystal planes, total reflection mirrors with {111} crystal planes are not universal

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