Organic-inorganic hybrid integrated polymer variable optical attenuator and preparation method thereof

Abstract

The invention discloses an organic-inorganic hybrid integrated polymer variable optical attenuator with a vertical multimode interference device structure and a preparation method thereof, and belongs to the technical field of polymer optical waveguide variable optical attenuators. The silicon dioxide lower cladding layer is prepared on the substrate; the silicon dioxide input waveguide unit, the polymer core layer waveguide unit and the silicon dioxide output waveguide unit are prepared on the silicon dioxide lower cladding layer along the light propagation direction; and the silicon dioxide lower cladding is arranged on the silicon dioxide input waveguide unit, the silicon dioxide upper cladding is arranged on the silicon dioxide lower cladding and wraps the silicon dioxide input waveguide unit and the silicon dioxide output waveguide unit, the polymer cladding is arranged on the silicon dioxide upper cladding and the polymer core layer waveguide unit, and the metal modulation electrode is arranged on the polymer cladding. The variable optical attenuator has the advantages of compact structure, low power consumption, high response speed, large extinction ratio and the like, can be used in a WDM (Wavelength Division Multiplexing) system in optical communication, and plays a role in balancing power.

Description

technical field [0001] The invention belongs to the technical field of polymer optical waveguide variable optical attenuators, in particular to a polymer variable optical attenuator (Variable Optical Attenuator) with a vertical multi-mode interferometer (Multi-Mode Interference, MMI) structure for organic / inorganic hybrid integration. Attenuator, VOA) and its preparation method. Background technique [0002] In the optical network, there is a possibility that the optical signal from the local node can be multiplexed and transmitted together with other signals of different optical powers that have transmitted different distances; even if the optical signal itself is multiplexed and transmitted, after a certain distance , Since devices such as Erbium Doped Fiber Amplifier (EDFA), optical filters, and optical switches respond slightly differently to each wavelength, their power may also be different. In addition, due to reasons such as optical network add / drop, reconfiguration...

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Problems solved by technology

[0008] Aiming at the problem of high power consumption of silica VOA, the present invention proposes to use polymers with fluidity and low-temperature treatment on the basis of silica PLC technology The advantages of organic-inorganic hybrid integrated devices are realized through inductively coupled plasma (Inductive Coupled Plasma, ICP) etching, spin coating, photolithography, development and other processes

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