Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Method for preparing amorphous SiOC coating by adopting chemical vapor deposition process

A chemical vapor deposition, amorphous technology, applied in the direction of coating, gaseous chemical plating, metal material coating process, etc., can solve the problems of easy wear and tear, and achieve the effect of good bonding, compact structure and low vaporization temperature

Pending Publication Date: 2021-11-23
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing amorphous SiOC coating by chemical vapor deposition process, which solves the problem of easy wear of stainless steel, carbon steel and other alloys during high-speed rolling friction, thereby effectively improving the friction resistance of metal materials such as stainless steel performance

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for preparing amorphous SiOC coating by adopting chemical vapor deposition process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] In this embodiment, the method for preparing an amorphous SiOC coating using a chemical vapor deposition process is as follows:

[0034] (1) Choose 316L stainless steel as the substrate, and use 400#, 800# and 2000# sandpaper to polish off the oxide scale on the surface of 316L stainless steel to make the surface smooth and free of burrs.

[0035] (2) The surface-polished 316L stainless steel was ultrasonically cleaned with isopropanol and ethanol for 15 minutes, and dried with nitrogen gas for later use.

[0036] (3) Mix hexamethyldisiloxane (HMDSO) and absolute ethanol according to a certain volume ratio, the volume ratio is 1, and use it as a precursor raw material after stirring evenly.

[0037] (4) When depositing an amorphous SiOC coating on a 316L stainless steel substrate, the flow rate of the mixed solution of hexamethyldisiloxane and absolute ethanol is 0.5g / min, the flow rate of argon gas is 3000 sccm, and the flow rate of hydrogen gas is 200 sccm. The tempe...

Embodiment 2

[0042] In this embodiment, the method for preparing an amorphous SiOC coating using a chemical vapor deposition process is as follows:

[0043](1) Choose 316 stainless steel as the substrate, and use 400#, 800# and 2000# sandpaper to polish off the scale on the surface of 316 stainless steel to make the surface smooth and free of burrs.

[0044] (2) The polished 316 stainless steel was ultrasonically cleaned with isopropanol and ethanol for 15 minutes respectively, and dried with nitrogen gas for later use.

[0045] (3) Tetraethoxysilane (TEOS) and absolute ethanol are mixed according to a certain volume ratio, the volume ratio is 1, and the mixture is uniformly stirred as a precursor raw material.

[0046] (4) When depositing an amorphous SiOC coating on a 316 stainless steel substrate, the flow rate of the mixed liquid of hexamethyldisilane and absolute ethanol is 0.8g / min, the flow rate of argon gas is 3000 sccm, the flow rate of hydrogen gas is 400 sccm, and the deposition...

Embodiment 3

[0051] In this embodiment, the method for preparing an amorphous SiOC coating using a chemical vapor deposition process is as follows:

[0052] (1) Choose 316L stainless steel as the substrate, and use 400#, 800# and 2000# sandpaper to polish off the oxide scale on the surface of 316L stainless steel to make the surface smooth and free of burrs.

[0053] (2) The surface-polished 316L stainless steel was ultrasonically cleaned with isopropanol and ethanol for 15 minutes, and dried with nitrogen gas for later use.

[0054] (3) Mix hexamethyldisiloxane (HMDSO) and hexamethyldisilane (HMDS) mixture (volume ratio 1:5), absolute ethanol according to a certain volume ratio, the volume ratio is 1, and stir well later as the precursor raw material.

[0055] (4) When depositing an amorphous SiOC coating on a 316L stainless steel substrate, the flow rate of the mixed liquid of organosilane and absolute ethanol is 1 g / min, the flow rate of argon gas is 5000 sccm, the flow rate of hydroge...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention belongs to the technical field of coating preparation, and particularly relates to a method for preparing an amorphous SiOC coating by adopting a chemical vapor deposition process. A thermal excitation type chemical vapor deposition system is adopted, hexamethyldisiloxane (HMDSO) or hexamethyldisilane or tetraethoxysilane, absolute ethyl alcohol and a hydrogen and argon gas system are selected, the ratio of organosilane to the absolute ethyl alcohol is controlled, under the conditions that the working pressure intensity is 10-1000 Pa and the temperature is 1000-1200 DEG C, the amorphous SiOC coating which is compact in structure and 0.1-50 microns in thickness is deposited on the surface of stainless steel, carbon steel or other alloys, the hardness range of the amorphous SiOC coating is 6-15 GPa, and the friction coefficient range is 0.02-0.2. The amorphous SiOC coating is good in chemical stability, good in wear resistance, high in oxidation resistance, high in creep resistance and good in binding force with stainless steel, carbon steel and other alloy matrixes. The amorphous SiOC coating can remarkably improve the friction and wear performance of the stainless steel and prolong the service life of a metal material.

Description

technical field [0001] The invention belongs to the technical field of coating preparation, and specifically relates to a method for preparing an amorphous SiOC coating on the surface of metal parts such as stainless steel, carbon steel, and titanium alloy by using a chemical vapor deposition process, which is mainly used to improve the wear resistance of metal parts , corrosion resistance and high temperature resistance. Background technique [0002] Because stainless steel, titanium alloy and other materials have strong corrosion resistance and good biocompatibility, they are widely used in medical devices. Some medical devices are used under high-speed friction conditions. After a certain period of use, the wear is severe, and even the wear debris falls off, which will cause fatal damage to the human body. In order to improve the high-speed friction performance of the device, it is necessary to modify its surface. [0003] In the SiOC coating, the content of silicon and ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C23C16/30C23C16/44C23C16/02
CPCC23C16/30C23C16/0254C23C16/0227C23C16/44
Inventor 唐明强刘厚盛崔新宇王吉强杨颖熊天英
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com