Preparation method of vanadium dioxide film based on nitrogen-hydrogen mixed gas generation device
A technology of nitrogen-hydrogen mixed gas and generating device, which is applied in the direction of mixing methods, chemical instruments and methods, mixers, etc., can solve the problems that the reducing atmosphere is prone to fluctuations and affects the quality of vanadium dioxide films, etc., and achieves low cost and repeatability Improved performance and better film quality
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[0040] A method for preparing a vanadium dioxide film based on the above device, comprising the following steps:
[0041] Step 1. adopt the PAD method to prepare the macromolecule precursor liquid containing vanadium ion, concrete process is: the polyetherimide (PEI) of 3.0g is dissolved in 60ml water, stirs the ethylenediaminetetraacetic acid (EDTA) of 3.0g after 30min EDTA), continue to stir until a uniform solution is formed, then add 1.2 g of ammonium metavanadate and stir in the solution for 30 minutes to form a transparent solution, and finally transfer the solution to an ultrafiltration device, adding 0.2 atmospheric pressure and magnetic stirring during filtration , to obtain the polymer precursor;
[0042] Step 2. Spin-coat the polymer precursor solution prepared in step 1 on the surface of the substrate, the specific process is; select crystal plane orientation as (10-10), sapphire (Al 2 o 3 ) as the substrate, the substrate was ultrasonically cleaned by acetone, a...
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