Flexible sensor for hardness detection, and manufacture method and application of flexible sensor
A flexible sensor and hardness technology, applied in the field of flexible sensors, can solve problems such as the need to improve measurement accuracy, lack of intraocular pressure sensor, change impedance, etc., to reduce the risk of cross-infection, easy and safe operation, and eliminate coupling effects.
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Embodiment 1
[0080] First, prepare the resistive layer:
[0081] (1) Take a clean 2-inch silicon wafer 2 and rinse it with acetone, isopropanol and deionized water in sequence, and then dry it with nitrogen;
[0082] (2) The sacrificial layer solution, i.e. 10% polyvinyl alcohol aqueous solution, is spin-coated on the polishing surface of the silicon wafer 2, the spin-coating speed is 200 rpm, and the time is 60 seconds, and then the silicon wafer 2 is placed on the hot Heating on the board, the heating temperature is 80°C, and the heating time is 15 minutes, so that the water is heated and evaporated, and the polyvinyl alcohol is cured to form a film, so as to obtain a polyvinyl alcohol sacrificial layer 1 with a smooth surface and tightly adhered to the silicon wafer 2;
[0083] (3) On the surface of the silicon wafer 2 with the polyvinyl alcohol sacrificial layer 1, spin-coat a layer of spin-coated polydimethylsiloxane, the spin-coating speed is 350 rpm, and the time is 120s, and then t...
Embodiment 2
[0104] The difference between this embodiment and Embodiment 1 is that the material used for the resistance layer is silver nanowires (AgNWs), and the spraying time is 60s.
Embodiment 3
[0106] The difference between this embodiment and Embodiment 1 is that the material used for the resistance layer is Au, and Cr and Au are deposited on the mask plate by magnetron sputtering, wherein Cr is used as an adhesion layer between Au and the flexible substrate; Configure ion gel solution, 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide [EMIM][TFSI], poly(vinylidene fluoride-hexafluoropropylene) P(VDF -HFP) and 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide [EMIM][TFSI] in a mass ratio of 1:2.
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