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Flexible sensor for hardness detection, and manufacture method and application of flexible sensor

A flexible sensor and hardness technology, applied in the field of flexible sensors, can solve problems such as the need to improve measurement accuracy, lack of intraocular pressure sensor, change impedance, etc., to reduce the risk of cross-infection, easy and safe operation, and eliminate coupling effects.

Pending Publication Date: 2021-11-26
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The technical solution is a non-invasive sensor contact lens for direct and continuous monitoring of intraocular pressure (IOP), including a biocompatible and transparent polymer nanocomposite material sensitive to pressure changes, but its measurement theory remains It is to directly convert the intraocular pressure into the deformation of the entire polymer nanocomposite, thereby changing its impedance, so the change of intraocular pressure is directly measured, and the measurement accuracy needs to be improved
[0005] In summary, the prior art still lacks an intraocular pressure sensor that can accurately measure intraocular pressure without damaging the eyeball

Method used

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  • Flexible sensor for hardness detection, and manufacture method and application of flexible sensor
  • Flexible sensor for hardness detection, and manufacture method and application of flexible sensor
  • Flexible sensor for hardness detection, and manufacture method and application of flexible sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0080] First, prepare the resistive layer:

[0081] (1) Take a clean 2-inch silicon wafer 2 and rinse it with acetone, isopropanol and deionized water in sequence, and then dry it with nitrogen;

[0082] (2) The sacrificial layer solution, i.e. 10% polyvinyl alcohol aqueous solution, is spin-coated on the polishing surface of the silicon wafer 2, the spin-coating speed is 200 rpm, and the time is 60 seconds, and then the silicon wafer 2 is placed on the hot Heating on the board, the heating temperature is 80°C, and the heating time is 15 minutes, so that the water is heated and evaporated, and the polyvinyl alcohol is cured to form a film, so as to obtain a polyvinyl alcohol sacrificial layer 1 with a smooth surface and tightly adhered to the silicon wafer 2;

[0083] (3) On the surface of the silicon wafer 2 with the polyvinyl alcohol sacrificial layer 1, spin-coat a layer of spin-coated polydimethylsiloxane, the spin-coating speed is 350 rpm, and the time is 120s, and then t...

Embodiment 2

[0104] The difference between this embodiment and Embodiment 1 is that the material used for the resistance layer is silver nanowires (AgNWs), and the spraying time is 60s.

Embodiment 3

[0106] The difference between this embodiment and Embodiment 1 is that the material used for the resistance layer is Au, and Cr and Au are deposited on the mask plate by magnetron sputtering, wherein Cr is used as an adhesion layer between Au and the flexible substrate; Configure ion gel solution, 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide [EMIM][TFSI], poly(vinylidene fluoride-hexafluoropropylene) P(VDF -HFP) and 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide [EMIM][TFSI] in a mass ratio of 1:2.

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Abstract

The invention belongs to the field of flexible sensors, and particularly relates to a flexible sensor for hardness detection, and a manufacture method and application of the flexible sensor. The flexible sensor comprises a resistive layer, an isolation layer, an upper electrode layer, a dielectric layer and a lower electrode layer, which are packaged and formed through bonding from top to bottom, wherein the upper electrode layer, the dielectric layer and the lower electrode layer are matched to measure pressure, and the resistive layer can measure deformation by measuring the change of resistance. The flexible sensor can measure hardness in combination with pressure and deformation. An eyeball deformation signal is obtained by measuring the change of the resistance of the resistive layer of the sensor, the pressure borne by the sensor is obtained by measuring the change of the capacitance of the sensor, and the hardness can be measured by combining the pressure and the deformation signal. When the flexible sensor is used for carrying out sensing monitoring onintraocular pressure, compared with a traditional ophthalmotonometer, anesthetic treatment is not required, direct contact with the cornea is not needed, unnecessary damage to corneal epithelial cells is avoided, and a risk of cross infection is reduced.

Description

technical field [0001] The invention belongs to the field of flexible sensors, and in particular relates to a flexible sensor for hardness detection and its preparation method and application. Background technique [0002] The existing 24-hour intraocular pressure fluctuation monitoring technology is mainly an invasive measurement method; the invasive measurement is to place the sensor directly into the eye, and the change of intraocular pressure will cause the change of the distance between the capacitor pole pieces of the "LC-resonant circuit", which is captured by an external receiver The resonant frequency of the overall circuit reflects changes and fluctuations in intraocular pressure. Although the invasive measurement method can be directly measured, it will cause irreversible damage to the eyeball. It is usually only used for critical glaucoma patients, and it is not applicable to the measurement of intraocular pressure for the general population. In terms of non-imm...

Claims

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Application Information

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IPC IPC(8): A61B3/16B32B27/28B32B27/36B32B27/32B32B27/30B32B27/06B32B33/00
CPCA61B3/16B32B27/283B32B27/36B32B27/281B32B27/322B32B27/304B32B27/06B32B33/00
Inventor 吴豪魏丹阳郭伟
Owner HUAZHONG UNIV OF SCI & TECH