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Preparation method of CrAlVSiN coating

A coating and functional layer technology, applied in the field of CrAlVSiN coating preparation, can solve the problems of poor oxidation resistance, weak wear resistance, short service life, etc., to reduce hardness difference, improve surface cleanliness, and reduce adverse effects Effect

Active Publication Date: 2022-04-15
SOUTHWESTERN INST OF PHYSICS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The object of the present invention is to provide a preparation method of CrAlVSiN coating, which is carried out by introducing glow discharge such as radio frequency and pulse, or introducing high-energy ion beam in Hall discharge mode Activation treatment, optimized process parameters, improved the bonding force of the CrAlVSiN hard coating film base, the prepared CrAlVSiN coating has high hardness, strong wear resistance and high temperature oxidation resistance, and can be used as the surface functional coating of tools, molds and bearings. It can show good cutting life, anti-adhesion and enhanced protection when coating; it effectively solves the weak wear resistance, poor oxidation resistance and short service life of cutting tool, mold and bearing material coating in high temperature environment in the prior art And other issues

Method used

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  • Preparation method of CrAlVSiN coating

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Effect test

Embodiment 1

[0039] After brushing the surface of the high-speed steel substrate with a soft brush, it is cleaned by 1005A organic solvent cleaning agent and anhydrous ethanol ultrasonically for 15 minutes each, and dried by hot air at 50°C for 10 minutes before being put into the furnace. Heating to 400°C, vacuuming to 3.0×10 -3 Below Pa, keep warm for 1.5 hours. Introduce Ar gas to make the vacuum degree 0.8Pa, set the bias voltage of the workpiece turret to -1200V, use the Hall ion source to activate the surface of the substrate, and the treatment time is 30min. Adjust the argon gas flow rate to 300 sccm, the bias voltage to -800V, turn on the Cr target, adjust the target current to 3A and carry out metal ion bombardment for 15 minutes. Using DC magnetron sputtering technology, open the nitrogen valve, send nitrogen 400sccm, adjust the flow rate of argon gas to 400sccm, adjust the bias voltage to -150V, open the Ti target and Al target at the same time, the target current is 3A, and de...

Embodiment 2

[0042] After brushing the surface of the high-speed steel substrate with a soft brush, it is cleaned by 1005A organic solvent cleaning agent and anhydrous ethanol ultrasonically for 15 minutes each, and dried by hot air at 50°C for 10 minutes before being put into the furnace. Heating to 400°C, vacuuming to 3.0×10 -3 Below Pa, keep warm for 1.5 hours. Oxygen was introduced to make the vacuum degree 0.1Pa, the bias voltage of the workpiece turret was set to -1200V, and the surface of the substrate was activated by Hall ion source, and the treatment time was 30min. Turn off the oxygen, feed the argon, adjust the argon flow rate to 300sccm, the bias voltage to -800V, turn on the Ti target, adjust the target current to 3A and carry out metal ion bombardment for 15min. Using pulse magnetron sputtering technology, open the nitrogen valve, send nitrogen 400sccm, adjust the flow of argon gas to 400sccm, adjust the bias voltage to -150V, open the Ti target and Al target at the same ti...

Embodiment 3

[0046] After brushing the surface of the high-speed steel substrate with a soft brush, it is cleaned by 1005A organic solvent cleaning agent and anhydrous ethanol ultrasonically for 15 minutes each, and dried by hot air at 50°C for 10 minutes before being put into the furnace. Heating to 400°C, vacuuming to 3.0×10 -3 Below Pa, keep warm for 1.5 hours. Oxygen was introduced to make the vacuum degree 0.1Pa, the bias voltage of the workpiece turret was set to -1200V, and the surface of the substrate was activated by Hall ion source, and the treatment time was 30min. Turn off the oxygen, feed in argon, adjust the argon gas flow rate to 300 sccm, the bias voltage to -1000V, turn on the Ti target, adjust the target current to 3A and carry out metal ion bombardment for 30 min. Using DC magnetron sputtering technology, open the nitrogen valve, send nitrogen 400sccm, adjust the flow rate of argon gas to 400sccm, adjust the bias voltage to -150V, open the Ti target and Al target at the...

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Abstract

The invention belongs to the technical field of surface engineering, and particularly relates to a preparation method of a CrAlVSiN coating, the CrAlVSiN coating comprises a transition layer, a middle layer and a functional layer, the transition layer is deposited on the surface of a base material, the middle layer is deposited on the transition layer, and the functional layer is deposited on the middle layer; the transition layer is TiAlN, and the middle layer is CrAlTiN; and the functional layer is CrAlTiN. According to the method, high-energy ion beams are introduced for activating treatment by introducing glow discharge such as radio frequency, pulse and the like or Hall discharge modes, process parameters are optimized, the film-substrate binding force of the CrAlVSiN hard coating is improved, and the prepared CrAlVSiN coating is high in hardness, high in wear resistance, resistant to high-temperature oxidation and good in corrosion resistance. And when the coating is used as a surface functional coating of a cutter, a mold and a bearing, the coating has good cutting life, adhesion resistance and reinforced protection effect.

Description

technical field [0001] The invention belongs to the technical field of surface engineering, and in particular relates to a preparation method of a CrAlVSiN coating. Background technique [0002] High-speed steel has high strength, hardness, thermal conductivity, low thermal expansion coefficient, and thermal fatigue sensitivity. It has always been the main manufacturing material for cutting tools, molds, and bearings, but it generally suffers from poor wear resistance and oxidation resistance after heating. Therefore, it is very important to carry out surface modification and strengthening on the basis of not changing the mechanical properties of the substrate. The CrAlN coating is mainly composed of CrN (fcc) and AlN (fcc) phases, which has high hardness and wear resistance. At the same time, Al and Cr elements form dense oxides (Al 2 o 3 and Cr 2 o 3 ), so as to prevent oxygen atoms from penetrating into the interior and resist high temperature oxidation, which can sig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/02C23C14/35
Inventor 钟利陈美艳唐德礼王新超许泽金刘旋崔西蓉
Owner SOUTHWESTERN INST OF PHYSICS
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