Manufacturing method of antireflection film on outer surface of infrared optical window and optical lens

An infrared optical window and optical lens technology, applied in optics, optical components, instruments, etc., can solve the problem of corrosiveness of the film layer, and achieve the effect of strong corrosion resistance and stable chemical properties

Pending Publication Date: 2022-05-06
洛阳微米光电技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] It is well known that for the infrared optical window and the outer surface of the optical system lens, it is necessary to have a certain ability to resist environmental erosion, and to ensure that the cold reflection of the optical system does not affect the imaging. The traditional dura film system ZNS, ytterbium fluoride and Ge, on the outer surface Coated with zirconia, the film layer is relatively hard and has a certain ability to resist environmental erosion, but the long-term environmental erosion is still corrosive to the film layer

Method used

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  • Manufacturing method of antireflection film on outer surface of infrared optical window and optical lens

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Comparison scheme
Effect test

Embodiment 1

[0020] The preparation method of the anti-reflection film on the outer surface of the infrared optical window and the optical lens specifically includes the following steps:

[0021] (1) Soak the anti-reflection coating substrate in gasoline and alcohol solution in turn for 4 hours. After soaking, wipe the parts with a mixture of alcohol and ether until the surface is clean; turn on the power of the coating machine, start the mechanical pump, and turn on the Pre-valve, close the pre-valve after pumping out the exhaust gas in the coating machine;

[0022] (2) Open the low valve and put the anti-reflection film substrate into the vacuum chamber of the coating machine to draw a low vacuum to 3.0E-3pa;

[0023] (3) Then apply a high vacuum to the anti-reflection film substrate. When it reaches 100Hz, close the low valve and open the pre-valve and high valve in turn, and restore the vacuum to 6.0E-3Pa;

[0024] (4) Heat the anti-reflection film substrate in the vacuum chamber, the...

Embodiment 2

[0029] The preparation method of the anti-reflection film on the outer surface of the infrared optical window and the optical lens specifically includes the following steps:

[0030] (1) Soak the anti-reflection coating substrate in gasoline and alcohol solution in turn for 6 hours. After soaking, wipe the parts with a mixture of alcohol and ether until the surface is clean; turn on the power of the coating machine, start the mechanical pump, and turn on the Pre-valve, close the pre-valve after pumping out the exhaust gas in the coating machine;

[0031] (2) Open the low valve and put the anti-reflection film substrate into the vacuum chamber of the coating machine to draw a low vacuum to 4.0E-3pa;

[0032] (3) Then apply a high vacuum to the anti-reflection film substrate. When it reaches 100Hz, close the low valve and open the pre-valve and high valve in turn, and restore the vacuum to 6.5E-3Pa;

[0033] (4) Heat the anti-reflection film substrate in the vacuum chamber, the...

Embodiment 3

[0038] The preparation method of the anti-reflection film on the outer surface of the infrared optical window and the optical lens specifically includes the following steps:

[0039] (1) Soak the anti-reflection coating substrate in gasoline and alcohol solution in turn for 5 hours. After soaking, wipe the parts with a mixture of alcohol and ether until the surface is clean; turn on the power of the coating machine, start the mechanical pump, and turn on Pre-valve, close the pre-valve after pumping out the exhaust gas in the coating machine;

[0040] (2) Open the low valve and put the anti-reflection film substrate into the vacuum chamber of the coating machine to draw a low vacuum to 4.0E-3pa;

[0041] (3) Then apply a high vacuum to the anti-reflection film substrate. When it reaches 100Hz, close the low valve and open the pre-valve and high valve in turn, and restore the vacuum to 6.5E-3Pa;

[0042] (4) Heat the anti-reflection film substrate in the vacuum chamber, the hea...

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Abstract

The invention discloses a preparation method of an antireflection film on the outer surfaces of an infrared optical window and an optical lens, and relates to the technical field of optical film preparation. After an antireflection film substrate is cleaned, a power supply of a coating machine is turned on, a mechanical pump is started, and a pre-valve is opened to extract waste gas in the coating machine; high vacuum pumping is conducted on the anti-reflection film base body, when the frequency reaches 100 Hz, the low valve is closed, the pre-valve and the high valve are sequentially opened, and the vacuum is recovered to reach 6.0-6.5 E <-3 > Pa; heating the antireflection film substrate in a vacuum chamber, performing airflow control on the vacuum chamber, respectively putting zirconium oxide, silicon dioxide and titanium dioxide for coating into three crucibles of a coating machine, starting evaporation coating, and preserving heat after coating is completed; and finally, the coating machine and the equipment power supply are turned off, and the part is taken out after waiting for 12-16 hours. According to the invention, the requirement of cold reflection of an optical system is finally met, and the optical window can be wiped by absorbent cotton after being subjected to environmental corrosion of a salt spray test and a mould test for a long time, so that the optical window and the appearance meet the requirements.

Description

technical field [0001] The invention relates to the technical field of optical film preparation, in particular to a method for manufacturing a high-strength hard anti-reflection film used on the outer surface of an infrared optical window and an optical system lens. Background technique [0002] It is well known that for the infrared optical window and the outer surface of the optical system lens, it is necessary to have a certain ability to resist environmental erosion, and to ensure that the cold reflection of the optical system does not affect the imaging. The traditional dura film system ZNS, ytterbium fluoride and Ge, on the outer surface Coated zirconia has a hard film layer and has a certain ability to resist environmental erosion, but the long-term environmental erosion is still corrosive to the film layer. Contents of the invention [0003] In order to overcome the deficiencies in the background technology, the invention discloses a method for manufacturing an ant...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/10C23C14/32C23C14/02G02B1/113
CPCC23C14/083C23C14/10C23C14/32C23C14/021G02B1/113
Inventor 李双双黄江波
Owner 洛阳微米光电技术有限公司
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