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Nitride hard film applied to surface of hot forging die and preparation method of nitride hard film

A hot forging die and film preparation technology, which is applied in metal material coating process, vacuum evaporation coating, coating, etc., can solve the problems affecting the surface finish of forgings and die life, the quality stability of forgings, and the increase of production costs. , to achieve the effect of shortening the number of maintenance and maintenance cycle, increasing the service life and improving the processing efficiency

Pending Publication Date: 2022-07-29
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Under such harsh working conditions, failure modes such as wear failure and thermal fatigue failure often occur on the surface of hot forging die steel. A substantial increase
However, there is no relevant report on the study of single-layer ZrCrN hard films.

Method used

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  • Nitride hard film applied to surface of hot forging die and preparation method of nitride hard film
  • Nitride hard film applied to surface of hot forging die and preparation method of nitride hard film
  • Nitride hard film applied to surface of hot forging die and preparation method of nitride hard film

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preparation example Construction

[0030] The preparation method of the thin film material provided by the present invention mainly comprises the following steps:

[0031] 1) Using hot forging die steel or high-speed steel as the base, grinding, polishing, cleaning and drying the steel base and fixing it on the rotatable workpiece frame in the vacuum chamber;

[0032] 2) Install a certain number of ZrCr targets and Cr targets on the target position inside the multi-arc ion plating equipment;

[0033] 3) Then pump the vacuum in the vacuum chamber to ≤5×10 -3 Pa, turn on the workpiece turret rotation system to make the workpiece rack rotate, the flow rate of argon gas is 200-600sccm, the working pressure is 1.0-2.0Pa, the workpiece is biased at -300--900V, and a glow discharge is generated in the vacuum chamber, which is harmful to the heat. Glow cleaning on the surface of the forging die;

[0034] 5) The flow rate of argon gas introduced into the medium is 40-200sccm, the working pressure of the arc evaporatio...

Embodiment 1

[0038] 1) Four ZrCr targets (Zr:Cr=80:20) and four Cr targets are used as deposition sources, wherein the purity of both ZrCr targets and Cr targets is 99.95%;

[0039] 2) H13 steel, a commonly used steel for hot forging dies, is used as the base. After grinding, polishing, cleaning, drying and sandblasting, the H13 steel base is fixed on a rotatable workpiece frame in a vacuum chamber. The workpiece frame rotates at 3 rpm and rotates. The way is uniaxial rotation.

[0040] 3) The vacuum degree in the vacuum chamber should be pumped to ≤5×10 -3 After Pa, 600sccm of argon gas was introduced, when the vacuum chamber pressure was 1.9Pa, the surface of the substrate was cleaned by glow for 30min, and the bias voltage of the workpiece holder was -900V.

[0041]4) Pour 40sccm of argon gas, when the vacuum chamber pressure is 0.2Pa, set the workpiece frame bias to -200V, the target current of 4 Cr targets is 50A, and the arc evaporates 4 Cr targets for 10min; Pour in 40sccm of argon...

Embodiment 2

[0045] 1) 4 pieces of ZrCr targets (Zr:Cr=50:50) and 4 pieces of Cr targets are used as deposition sources, wherein the purity of the ZrCr targets and the Cr targets are both 99.95%;

[0046] 2) M2 steel high-speed steel is selected as the substrate, and the steel substrate is ground, polished, cleaned, dried and sandblasted, and then fixed on the rotatable workpiece rack in the vacuum chamber. The workpiece rack rotates at 3 rpm and the rotation mode is uniaxial rotation. .

[0047] 3) The vacuum degree in the vacuum chamber should be pumped to ≤5×10 -3 After Pa, 500sccm of argon gas was introduced. When the pressure of the vacuum chamber was 1.8Pa, the surface of the substrate was cleaned by glow for 30min, and the bias voltage of the workpiece holder was -300V.

[0048] 4) Pour 40sccm of argon gas, when the vacuum chamber pressure is 0.2Pa, set the workpiece frame bias to -200V, the target current of 4 Cr targets is 60A, and the arc evaporates 4 Cr targets for 10min; Pour ...

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Abstract

The invention belongs to the technical field of new materials, and discloses a nitride hard film applied to the surface of a hot forging die, and the nitride hard film comprises 5-55% of Zr element, 5-55% of Cr element, and 35-51% of N element. The nitride hard thin film prepared through the method is of a gradient structure, the base layer Cr layer can effectively improve the bonding strength between the hard thin film and a hot forging die steel base body, and the transition layer CrN can play a role in reducing the hardness, elasticity modulus and thermal expansion coefficient difference between the hard thin film and the steel base body. The ZrCrN nitride hard film on the surface layer provides a surface protection effect for the hot forging die under complex working conditions, and compared with a pure Zr and pure Cr target co-deposition mode, the ZrCr alloy target is adopted, so that the process stability is facilitated, and the element adjusting range is expanded.

Description

technical field [0001] The invention belongs to the technical field of new materials, in particular to a nitride hard film applied to the surface of a hot forging die and a preparation method thereof. Background technique [0002] Hot forging die steel, as a typical hot work die steel, has a very bad working condition, mainly because it needs to bear the test of mechanical load and thermal load at the same time, and the mechanical load is mainly impact force and friction force. , the heat load is mainly based on alternating heating and cooling. Under such harsh working conditions, wear failure and thermal fatigue failure often occur on the surface of hot forging die steel. These failure modes will directly affect the surface finish of the forging and the life of the die, reduce the quality stability of the forging, and reduce the production cost. A substantial increase. Therefore, how to improve the service life of hot forging die steel has become an urgent problem to be s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/32C23C14/02C23C14/16
CPCC23C14/0641C23C14/325C23C14/022C23C14/0021C23C14/16C23C14/025
Inventor 朱晓东张培汉宋忠孝孟瑜李雁淮钱旦王永静
Owner XI AN JIAOTONG UNIV