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Nitride thin film of transition metal capable of being as anode material of batteries its preparation method

A transition metal, lithium battery anode technology, applied in electrode manufacturing, metal material coating process, gaseous chemical plating, etc., can solve the problems of unsatisfactory specific capacity and reversible cyclability.

Inactive Publication Date: 2003-10-08
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the electrode materials used in lithium-ion batteries include Sn 3 N 2 , and lithium-containing transition metal nitrides Li 2.6 co 0.4 N, Li 2.7 Fe 0.3 N, etc., this kind of battery electrode material, specific capacity and reversible cycle, etc. are still not ideal
Before the present invention, no reports about the preparation of lithium-free transition metal nitrides and their electrochemical properties were found

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] Co prepared on stainless steel sheets, glass, or transparent conductive glass (ITO) coated with indium tin oxide (ITO) by reactive pulsed laser deposition, respectively. 3 N film. The 355nm pulsed laser is generated by frequency-tripling the fundamental frequency generated by the Nd:YAG laser. The laser beam is focused by the lens and then incident on the metal cobalt target. The substrate temperature is 150°C, the deposition time is 1.5 hours, the ambient pressure is 30Pa, and the environment N 2 The gas is purple.

[0015] The as-deposited film was determined by X-ray diffraction to be a polycrystalline cubic structure of Co 3 N. X-ray photoelectron spectroscopy shows N and Co peaks, and the N content is estimated to be 25%. Co obtained by pulsed laser reactive deposition was determined by scanning electron microscopy. 3 The N thin film is composed of particles with a diameter of about 30 nanometers, the particles are uniformly distributed, and there are no pinho...

Embodiment 2

[0023] Fe was prepared on stainless steel sheets, glass, and transparent conductive glass (ITO) coated with indium tin oxide (ITO) by reactive pulsed laser deposition, respectively. 3 N film. The 355nm pulsed laser is generated by triple frequency of the fundamental frequency generated by the Nd:YAG laser. The laser beam is focused by the lens and then incident on the metal iron target. The substrate temperature is 100°C, the deposition time is 1.5 hours, the ambient pressure is 25Pa, and the environment N 2 The gas is purple.

[0024] The as-deposited film was determined by X-ray diffraction to be a polycrystalline cubic structure of Fe 3 N, with a small amount of Fe 4 N. X-ray photoelectron spectroscopy shows N and Fe peaks, and the N content is estimated to be 23%. Fe obtained by pulsed laser reactive deposition was determined by scanning electron microscopy. 3 The N thin film is composed of particles with a diameter of about 30 nanometers, the particles are uniformly...

Embodiment 3

[0032] Preparation of Ni on stainless steel sheets, glass, and transparent conductive glass (ITO) coated with indium tin oxide by reactive pulsed laser deposition 3 N film. The 355nm pulsed laser is generated by frequency-tripling the fundamental frequency generated by the Nd:YAG laser, and the laser beam is incident on the metal nickel target after being focused by the lens. The substrate temperature is 100°C, the deposition time is 2 hours, the ambient pressure is 10Pa, and the environment N 2 The gas is purple.

[0033] The deposited film was determined by X-ray diffraction to be polycrystalline cubic Ni 3 N, containing a small amount of Ni 4 N. X-ray photoelectron spectroscopy shows N and Ni peaks, and the N content is estimated to be 21%. Ni produced by pulsed laser reactive deposition was determined by scanning electron microscopy 3 The N thin film is composed of particles with a diameter of about 30 nanometers, the particles are uniformly distributed, and there ar...

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Abstract

The invention discloses the new typed nitride Co3N, Fe3N and Ni3N thin films to be used as anode materials of lithium ion batteries. Under nitrogen atmosphere, the thin films can be obtained through the reactive deposition of pulse lasers. The particle sizes are 20-500 nm presenting the polycrystal cube structure. The discharge platforms are appeared at about 0.64V, 0.70V and 0.92V when the battery consists of the said thin films as the electrode and metal lithium. Excellent reversibility of charging and discharging cycles is maintained at 3.50-0.01 V and current density 7 micron A / cm2. The specific capacities are at about 420, 440 and 420 mAh / g. after 80 times of cycle, the loss of reversible capacity is less than about 5%.

Description

technical field [0001] The invention relates to a lithium ion battery anode material and a preparation method thereof, in particular to a transition metal nitride film material and a preparation method thereof. Background technique [0002] With the miniaturization of microelectronic devices, it is urgent to develop a matching miniaturized and long-life power supply. Compared with other chemical batteries, the all-solid-state rechargeable lithium-ion thin film battery has the characteristics of large specific capacity, long charge and discharge life, and good safety performance, and has become a key research and development object in the field of electrochemistry. In this battery, the performance of the electrode material will directly affect the performance of the battery. In order to improve the performance of all-solid-state thin-film lithium-ion batteries, the key is to find electrode materials with high specific capacity, long cycle life and less irreversible capacity ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/34H01M4/04
CPCY02E60/10
Inventor 傅正文秦启宗赵胜利岳小力
Owner FUDAN UNIV
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