Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus

A technology of piezoelectric elements and piezoelectric layers, applied in the manufacture/assembly of piezoelectric devices/electrostrictive devices, electrical components, piezoelectric/electrostrictive devices, etc., can solve problems such as cracking and achieve reliable Improved performance and good piezoelectric properties

Active Publication Date: 2005-10-05
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0018] Furthermore, even if the (100) plane or (001) plane oriented film cannot be obtained, there is a problem of cracking when the piezoelectric element continues to be driven.
In addition, even if it is a (111) plane oriented film, there is a problem of cracking like a (100) plane or (001) plane oriented film.

Method used

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  • Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus
  • Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus
  • Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0143] In Example 1, the material, film thickness, manufacturing method, etc. of each film are the same as those described in the above-mentioned Embodiment 1. Immediately after the completion of the production, no cracks or film peeling were observed in the respective films of the piezoelectric element of Example 1.

[0144] The crystal orientation and film composition of the piezoelectric layer before forming the second electrode layer were studied. That is, according to the analysis by the X-ray diffraction method, the piezoelectric layer showed a (100) plane-oriented triangular perovskite type crystal structure, and the (100) plane orientation degree was α=97%. In addition, composition analysis with an X-ray microanalyzer revealed that the composition of the piezoelectric layer was the same as that of the target, the ratio of Zr / Ti was 55 / 45, and the ratio of Mg / Nb was 33 / 67.

[0145] Further, the crystal structure of the piezoelectric layer was analyzed with a scanning e...

Embodiment 2

[0158]In Example 2, the substrate is 0.25 mm thick and  is 4 inches of stainless steel (SUS304), the adhesion layer uses a tantalum (Ta) film with a film thickness of 0.01 micron; the first electrode layer uses a film thickness of 0.25 micron, containing A Pt film of 8 mol% titanium oxide; the orientation control layer uses a PLT film with a film thickness of 0.03 microns, containing 17 mol% of lanthanum, and an excess of 6 mol% of the lead content compared to the stoichiometric composition (3 mol% of magnesium is added); 0.8PZT(Zr / Ti=40 / 60)-0.2Pb(Mg 1 / 3 Nb 2 / 3 )O 3 film; a Pt film with a film thickness of 0.1 μm was used for the second electrode layer.

[0159] Using a Ta target, in an argon gas of 1 Pa, the substrate was heated to 500° C. and a high-frequency power of 100 W was applied for 1 minute to obtain the above-mentioned adhesion layer.

[0160] Using a multi-target sputtering device, using a titanium target and a Pt target, while heating the substrate to 400 ° C,...

Embodiment 3

[0174] In Example 3, the substrate is barium borosilicate glass (100 mm square size) with a thickness of 0.5 mm, and the adhesive layer uses a nickel (Ni) film with a film thickness of 0.005 micron; the first electrode layer uses a film thickness of 0.15 micron, An iridium (Ir) film containing 18 mol% of titanium; the orientation control layer uses a PLT film (adding 1 mol% of manganese) with a film thickness of 0.02 microns, containing 8 mol% of lanthanum and an excess of 16 mol% in lead content compared to the stoichiometric composition; The electrode layer uses 0.9PZT (Zr / Ti=40 / 60)-0.1Pb(Ni 1 / 3 Nb 2 / 3 )O 3 For the second electrode layer, a Pt film with a film thickness of 0.01 μm was used.

[0175] Using a Ni target, in an argon gas of 1 Pa, the substrate was heated to 300° C. and a high-frequency power of 200 W was applied for 1 minute to obtain the above-mentioned adhesion layer.

[0176] Using a multi-target sputtering device, in an argon gas of 1 Pa, the substrate wa...

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Abstract

In a piezoelectric element, an orientation controlling layer 15 of a cubic or tetragonal system is provided on a first electrode layer 14, and onto this orientation controlling layer 15, a piezoelectric layer 16 is formed that is composed of lead zirconate titanate to which 1 mol% or more and 50 mol% or less of a Pb-containing complex perovskite compound is added, whose chemical formula is expressed by Pb(AaBb)O3, and that has a crystal structure of a rhombohedral or tetragonal system. When forming this piezoelectric layer 16, its crystal grains should be columnar grains that extend in the direction of the pioezoelectric layer's thickness and the ratio of whose average sectional diameter to the length is 1 / 50 or more and 1 / 14 or less.

Description

technical field [0001] The present invention relates to a piezoelectric element exhibiting an electromechanical conversion function, an inkjet head using the piezoelectric element, an angular velocity sensor and a manufacturing method thereof, and an inkjet type recording apparatus equipped with the above inkjet head as a printing apparatus. Background technique [0002] In general, a piezoelectric material is a material that converts mechanical energy into electrical energy, or vice versa. Lead zirconate titanate (Pb(Zr,Ti)O) with perovskite crystal structure 3 ) (hereinafter referred to as PZT) is the representative of the piezoelectric material. In this PZT, the direction in which the maximum piezoelectric displacement can be obtained is the <001> direction (c-axis direction) in the case of the tetragonal crystal system, and the <111> direction in the case of the trigonal crystal system. However, since many piezoelectric materials are polycrystals composed o...

Claims

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Application Information

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IPC IPC(8): B41J2/01B41J2/045B41J2/14B41J2/16G01C19/56H01L41/08H01L41/09H01L41/18H01L41/22
CPCB41J2/161B41J2/1623B41J2/1628B41J2/1631B41J2/1632B41J2/1642B41J2/1645B41J2/1646G01C19/5607H01L41/0815H01L41/0973H01L41/1876H01L41/316H10N30/2047H10N30/8554H10N30/076H10N30/708
Inventor 藤井觉镰田健友泽淳藤井映志
Owner PANASONIC CORP
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