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Composite reinforcing and treating method for alumium or alumium alloy substrate surface through ion implantation and deposition

A technology of ion implantation and strengthening treatment, applied in ion implantation plating, metal material coating process, coating, etc., can solve problems such as poor bonding force and bearing capacity, low wear resistance, large residual stress, etc., to achieve Effects of improving hardness and load-bearing capacity, high bonding force, and excellent surface properties

Inactive Publication Date: 2006-11-08
HARBIN INST OF TECH
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  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of large residual stress, poor bonding force and bearing capacity between the diamond-like carbon film (DLC) and the aluminum or aluminum alloy substrate, and the low wear resistance of the diamond-like carbon film under high-speed and heavy-load conditions, which is easy to The problem of peeling off from the aluminum or aluminum alloy substrate provides a composite strengthening treatment method of ion implantation and deposition on the surface of the aluminum or aluminum alloy substrate

Method used

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  • Composite reinforcing and treating method for alumium or alumium alloy substrate surface through ion implantation and deposition
  • Composite reinforcing and treating method for alumium or alumium alloy substrate surface through ion implantation and deposition

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specific Embodiment approach 1

[0006] Specific Embodiment 1: In this embodiment, the ion implantation and deposition composite strengthening treatment method on the surface of aluminum or aluminum alloy substrate is carried out according to the following steps: (1) Aluminum or aluminum alloy is sequentially carried out in a solution of acetone and ethanol with a purity of ≥99.9%. Ultrasonic cleaning; (2) Aluminum or aluminum alloy is cleaned by argon plasma sputtering, the flow rate of argon gas is 50-80 sccm, and the working pressure is 2.0×10 -1 ~8.0×10 -1 Pa, the bias amplitude is 4~8kV, the bias pulse width is 20~60μs, the pulse frequency is 50~100Hz, the radio frequency power is 300~600W, and the processing time is 20~30min; (3) Titanium treatment of aluminum or aluminum alloy Ion implantation, titanium plasma is generated by a magnetically filtered pulsed cathode arc source of titanium with a purity of 90% to 99.999%, and the working pressure of titanium ion implantation is 2.0×10 -2 ~6.0×10 -2 Pa, ...

specific Embodiment approach 2

[0009] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the time for the two ultrasonic cleanings in step (1) is 8-15 minutes. Other steps are the same as those in Embodiment 1.

specific Embodiment approach 3

[0010] Embodiment 3: The difference between this embodiment and Embodiment 1 is that the N plasma is generated by nitrogen gas flowing into the vacuum chamber. Others are the same as the first embodiment.

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Abstract

The present invention provides composite reinforcing treatment process for aluminum or aluminum alloy substrate surface through both ion implantation and deposition. The present invention solves the problems of great residual stress, lower binding force and poor bearing capacity of diamond-like carbon film on aluminum or aluminum alloy substrate, and the low wear resistance of DLC film under high speed and heavy load condition. The composite reinforcing treatment process includes the following steps: ultrasonic cleaning of aluminum or aluminum alloy substrate; Ar ion sputtering cleaning; Ti ion implantation; PIIID deposition of Ti film; PIIID deposition of TiN film; PIIID deposition of Ti(CN) film; PIIID deposition of TiC film and synthesis of diamond-like carbon film. All the steps but the first mentioned one are completed in vacuum chamber. The DLC film of the present invention has 10 times over raised wear life compared with single DLC film in the same thickness and friction coefficient lower than 0.1.

Description

technical field [0001] The invention relates to a composite strengthening treatment method of ion implantation and deposition on the surface of metal materials. Background technique [0002] Aluminum or aluminum alloy is widely used in industrial fields such as aviation, aerospace, automobile and microelectronics because of its light weight and high specific strength. However, the requirements for the surface of aluminum or aluminum alloy are getting higher and higher. Low hardness and poor wear resistance, so surface strengthening treatment is required to improve its surface properties. Diamond-like carbon film (DLC) has excellent properties such as high hardness, low friction coefficient, good thermal conductivity, good chemical stability, large deposition area, smooth and flat film surface, and is an ideal coating material for surface modification of materials. However, due to the difference in performance and composition between aluminum and aluminum alloy and diamond-l...

Claims

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Application Information

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IPC IPC(8): C23C14/48C23C14/02C23C14/16C23C14/54
Inventor 王宇航王浪平王小峰汤宝寅
Owner HARBIN INST OF TECH
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