Composition of carbon nitride, thin film transistor with the composition of carbon nitride, display device with the thin film transistor, and manufacturing method thereof

a technology of carbon nitride and thin film transistor, which is applied in the direction of chemical vapor deposition coating, non-metallic protective coating application, coating, etc., can solve the problems of low dielectric constant of insulating film, circuit delay, and conventional composition of carbon nitride with deposition method and limited properties
US20040227197A1Inactive Publication Date: 2004-11-18SEMICON ENERGY LAB CO LTD
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
SEMICON ENERGY LAB CO LTD
Publication Date
2004-11-18
Estimated Expiration
Not applicable · inactive patent

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Abstract

A conventional composition of carbon nitride has a deposition method and properties limited. In the case of using the composition of carbon nitride as a protective film, for example, a material of an object to be coated (goods) is required to satisfy with a condition in disagreement with a temperature during forming the composition of carbon nitride. Besides, in the case of using the composition of carbon nitride as an insulating film in a semiconductor device, low stress relaxation and low coverage for a step are produced since the insulating film has a low hydrogen concentration. Consequently, a composition including carbon nitride according to the present invention is formed at a deposition temperature that enables to include hydrogen in the composition at 30 to 45 atomic %, for example, at temperatures of 100° C. or less, preferably 50° C. or less, more preferably from 20° C. to 30° C., with stability and adhesiveness kept.
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Description

[0001] 1. Field of the Invention

[0002] The present invention relates to a composition including carbon nitride, which can be formed at a low temperature and is suitable, and a method of manufacturing thereof.

[0003] Additionally, the present invention also relates to goods such as containers for food or beverage, and electronic parts, which are coated with a composition including carbon nitride according to the present invention. Moreover, the present invention relates to a thin film transistor that has the composition including carbon nitride as an insulating film such as an interlayer insulating film, a base film, or the other insulating film; a display device, a liquid crystal display device, and the other display device, which comprise the thin film transistor; and methods for manufacturing thereof.

[0004] 2. Description of the Related Arts

[0005] Conventionally, research has been conducted in wide range of fields while making use of properties of a composition of carbon nitride.[0...

Claims

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