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Process for preparing diamond-like coating containing nano gold particles

A nano-gold particle and nano-particle technology, applied in metal material coating process, liquid chemical plating, coating and other directions, can solve problems such as unfavorable large-area deposition and large-scale industrial production, high preparation cost, complex equipment, etc. Achieve the effect of good uniformity, low preparation cost and uniform distribution

Inactive Publication Date: 2007-09-05
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

However, their complex equipment and high preparation cost are not conducive to large-area deposition and large-scale industrial production

Method used

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Embodiment 1

[0011] Dissolve 0.1g of polycarbobenzene powder in 10ml of tetrahydrofuran, then add 0.05g of chloroauric acid to prepare a mixed solution of tetrahydrofuran containing polycarbobenzene and chloroauric acid; then apply the solution to the pre-cleaned surface by spin coating On the monocrystalline silicon wafer, after the organic solvent volatilizes, a precursor film with a film thickness of 1000 nanometers is formed on the surface of the silicon wafer; the silicon wafer coated with chloroauric acid and polymer film is placed in a tube furnace, and the Under the protection of argon, first raise the temperature to 150°C, and then keep the temperature for tens of minutes. After the tetrahydrofuran is completely volatilized, then quickly raise the temperature to 600°C, heat treatment at this temperature for 1-2 hours, and finally cool naturally to room temperature to prepare gold-containing nanoparticles. DLC film.

[0012] The prepared DLC film containing gold nanoparticles and t...

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Abstract

The present invention discloses a process for producing a nanometer gold granule containing diamond-like carbon thin films. Said process comprises the steps of preparing a poly(phenylcarbyne)-chlorauric acid containing tetrahydrofuran precursor solution, coating a monocrystalline silicon surface with the mixing solution through spin-coating method, resulting in formation of chlorauric acid-poly(phenylcarbyne) thin film at silicon face after volatilization of the organic solvents; processing the silicon chips coated with thin films for 1-2 hours at a temperature of 500-700 DEG C under argon atmosphere, and then naturally dropping to room temperature to obtain gold nanometer granules containing diamond-like carbon thin films. The present invention is characterized by its easy preparing course, wherein the metal nanometer granules containing diamond-like composite thin films are prepared through one-step synthesis. Said thin film is hopeful to find uses in fields of mechanical friction, electrochemistry electrode, metal catalysis, optics and the like.

Description

technical field [0001] The invention relates to a preparation method of a diamond-like carbon film containing nano-gold particles. Background technique [0002] Diamond-like carbon (DLC) films have many excellent properties in advanced chemistry, electronics, optics and mechanics, such as extremely high hardness, chemical inertness, low coefficient of friction, high resistance, good thermal conductivity and Excellent optical permeability, etc., so it can be widely used as wear-resistant protective layer for optical devices, magnetic memory devices, high-temperature semiconductor materials, mechanical tools and medical orthopedics. A lot of research on DLC films has focused on its preparation technology. At present, chemical vapor deposition and physical vapor deposition are generally used to prepare diamond-like carbon films, such as microwave plasma assisted deposition, magnetron sputtering deposition and pulsed laser deposition. High quality DLC films can be obtained. Ho...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C18/12
Inventor 杨生荣徐洮阎兴斌
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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