Sample enrichment chip, manufacturing method and enrichment method and on micronano structure
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A micro-nano structure and enrichment technology, applied in the field of analytical chemistry, to achieve the effects of portability, small size and simple operation
Inactive Publication Date: 2007-07-18
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Embodiment 1
[0023] Example 1 Manufacturing process of sample enrichment chip based on micro-nano structure
[0024] 1. First, nano-channels and nano-scale transmission pipes are processed on the surface of quartz glass by MEMS technology
[0025] A. Fabrication of micron-scale transmission pipes
[0026] 1) First photolithography
[0027] ①Cleaning: ultrasonically clean the quartz glass substrate with acetone, ethanol, and deionized water for 5 minutes; blow dry with nitrogen; dry,
[0028] ② Evaporate hexamethyldisiloxane, apply photoresist 6809 and spin the glue, the speed is 4000rpm, the glue throwing time is 30s,
[0029] ③Pre-baking: 100℃, 6min
[0030] ④ Photolithography: at 12mW / cm 2 Intensity Lithography, Machine Lithography, 12s,
[0031] ⑤ Development: 18s,
[0032] ⑥Priming film for 10s,
[0033] ⑦ Harden the film in an oven at 120°C for 30 minutes;
[0034] 2) Micron-scale pipeline corrosion
[0035] ① Chromium removal: Use chromium corrosion solution prepared by ceri...
Embodiment 2
[0060] The enrichment method of embodiment 2 enrichment chip
[0061] On the basis of the chip after low-temperature bonding in Example 1, the following two process steps are used to achieve enrichment
[0062] 1. Chip surface treatment: use 1mol / L NaOH solution to fill the newly bonded chip, rinse 3 times, let stand for 30min, and rinse with deionized water.
[0063] 2. The protein labeled with FITC fluorescent dye is used as the sample, and 0.75mmol / L boric acid is used as the buffer solution; the sample is transferred to the nano-ion trap area with a 30V DC voltage, as shown in Figure 4 (a); the sample band is due to The ions caused by the nanometer region are trapped, piled up and enriched continuously, as shown in Figure 4(b); the compressed sample is tuned by using voltage, and introduced into the detection area for sample detection, as shown in Figure 4(c).
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Abstract
The invention relates to sample enrichment chip, manufacturing method and enrichment method based on micro nanostructure. Its feature is that the enrichment chip is used quartz glass as backing material, formed by enrichment nanometer channel and micro sample transmitting pipeline. It applies MEMS technique to process the channel and pipeline one the quartz glass, strictly control channel depth to make it satisfy ion falling demand, utilizes low temperature bonding method to process for the substrate and covering piece, fills sample into chip pipeline, adds direct voltage in the sample pool to form electric field in nanometer channel. Because of Debye layers in the channel are superposed, while ion falling zoon is formed beside the channel. The sample moved under the action of the electric field is enriched beside the channel to form sample enrichment zoon. The chip has small volume, will not destroy enrichment component while enriching.
Description
technical field [0001] The present invention relates to a highly efficient sample enrichment chip based on micro-nano structure and its manufacturing method, more precisely to a sample enrichment chip based on micro-nano structure, its manufacturing method and its sample enrichment method based on the principle of ion trapping. It belongs to the field of analytical chemistry. Background technique [0002] Micro total analysis system (also known as lab-on-a-chip) is a concept proposed by Manz et al in the 1990s. The basic operation units such as sample preparation, biological and chemical reactions, separation, and detection are fully integrated or partially integrated on a chip of several square centimeters to complete different biological or chemical reaction processes and analyze their products. After more than ten years of development, the separation, analysis and detection systems of nucleic acids, proteins, organic compounds and inorganic ions on microchips have develo...
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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/34G01N30/08
Inventor 金庆辉刘菁赵建龙
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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