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Method for micro-processing patterned surface based on super hydrophilic-super hydrophobic characteristic template

A surface pattern and super-hydrophobic technology, which is applied in the field of super-hydrophobic/super-hydrophobic templates, can solve problems that are difficult to widely apply in scientific research and high-tech fields, complex and expensive, etc.

Inactive Publication Date: 2009-12-16
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional silicon three-dimensional micromachining technology is difficult to be widely used in scientific research and high-tech fields other than microelectronics due to the need for complex and expensive equipment and harsh working environments. Therefore, the development is simple, cheap, and suitable for ordinary laboratories (especially Chemistry Laboratory) non-silicon surface patterning technology has become a subject involving many disciplines

Method used

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  • Method for micro-processing patterned surface based on super hydrophilic-super hydrophobic characteristic template
  • Method for micro-processing patterned surface based on super hydrophilic-super hydrophobic characteristic template
  • Method for micro-processing patterned surface based on super hydrophilic-super hydrophobic characteristic template

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Example 1: First obtain a layer of nano-ordered TiO on the surface of the substrate by electrochemical anodic oxidation 2 The nanotube array film was heat-treated at 450°C for 2 hours, and then cooled in a furnace for standby use. Self-assemble a PTES monomolecular layer on the surface of the obtained film layer, then cover the surface of the film layer with a photomask, and irradiate with ultraviolet light for a certain period of time to obtain a superphobic-superhydrophilic pattern. figure 1 Fluorescence micrographs of several prepared surface-modified sodium fluorescein with different superphilic / superhydrophobic patterns. Depend on figure 1 It can be seen that the introduced sodium fluorescein is mainly aggregated and adsorbed in the superhydrophilic region, which emits obvious green light under the excitation of blue light (450-490nm). In the superhydrophobic area, due to its superhydrophobicity, the adsorption of sodium fluorescein is effectively prevented, ther...

Embodiment 2

[0027] Example 2: figure 2 Schematic diagram of the preparation of micro-nano composite structures by wet chemical etching using superphilic / superhydrophobic patterns as templates. image 3 and Figure 4 Respectively, using superphilic / superhydrophobic micropatterns as templates, after etching with 0.1wt% HF solution for 120s, the TiO 2 Laser confocal micrographs and optical micrographs of micro-nano patterns were obtained on the surface of the nanotube array film. The square block in the figure is the superhydrophilic region etched by hydrofluoric acid, which is obviously different from the superhydrophobic region protected by the PTES film layer. Two types of micropatterns with significant differences in region composition are basically consistent in shape and size with the photomask. Figure 5 A field emission scanning electron microscope image of the micropattern. from Figure 5 a, b It can be seen that the micropattern morphology is clearly visible, and the boundari...

Embodiment 3

[0029] Example 3: similar to Example 2, the difference is that etching in 0.5wt% HF solution for 30s can construct a clear surface micropattern on the titanium substrate by three-dimensional ultramicromachining. Figure 7 is an optical micrograph of the micropattern prepared after etching in 0.5 wt% HF solution for 30 s.

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Abstract

The invention provides a method for micro-processing a patterned surface based on a super hydrophilic-super hydrophobic characteristic template, and relates to a super hydrophilic-super hydrophobic characteristic template. The invention provides a method for micro-processing the patterned surface based on a super hydrophilic-super hydrophobic characteristic template, which has the advantages of strong practicability, easy operation, strong controllability and simple equipment, and is based on a super hydrophilic-super hydrophobic characteristic template technique and suitable for common laboratories. The method comprises the following steps of: performing the electrochemical anode oxidation of a substrate to obtain a membranous layer with a nano-ordered TiO2 nano-array structure, performing heat treatment on the membranous layer, t cooling the membranous layer to obtain a sample, soaking the sample in solution of fluorine silicane methanol, taking the sample out, and drying the sample to obtain the super hydrophobic TiO2 nano-structure array membranous layer; covering a photomask on the surface of the membranous layer, and obtaining a super hydrophilic-super hydrophobic pattern of which the size and the shape are consistent with those of the photomask on the surface of the substrate by ultraviolet irradiation; and preparing the surface micron-nano structure of which the pattern size and the shape are consistent with those of the photomask by taking the super hydrophilic-super hydrophobic pattern as the template through acid or alkali wet chemical etching microprocessing.

Description

technical field [0001] The invention relates to a template with superphilic / superhydrophobic properties, in particular to a method for performing surface patterned micromachining on the surface of a titanium or titanium alloy substrate by using wet chemical etching technology and photolithography technology. Background technique [0002] Micro- and nano-scale patterned surface processing technology has very important application prospects in the fields of microelectronics, optics, biology, chemistry and material science ([1] Sirringhaus H, Tessler N, Friend R.H, Integrated optoelectronic devices based on conjugated polymers[ J], Science, 1998, 280: 1741-1744; [2] Roman L.S, InganasO, Granlund T.Nyberg T, Svensson M, Andersson M.R, Hummelen J.C, Trapping light inpolymer photodiodes with soft embossed gratings[J], Adv. Mater., 2000, 12(3):189-195). Traditional silicon three-dimensional micromachining technology is difficult to be widely used in scientific research and high-te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/00
Inventor 林昌健赖跃坤
Owner XIAMEN UNIV
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