Static-driven tunable optical filter based on optical waveguide and F-P cavity and manufacturing method thereof

Abstract

The invention provides a tunable optical filter driven by a static comb-shaped electrode based on an SOI optical waveguide and an F-P cavity, as well as a manufacturing method thereof. The comb-shapedelectrode drives two symmetric DBRs to move so as to realize a tunable optical filtering function by adjusting the equivalent cavity length of the F-P cavity. The tunable optical filter with the structure has the advantages of wide tuning range, high tuning precision, high tuning speed, novel and compact structure, convenient integration with other optical and electrical elements. The symmetricaltuning method with two DBRs which move simultaneously is adopted to expand wavelength tuning range. The BDR and the F-P cavity are manufactured by taking good use of crystallographic characteristicsof a (110) silicon slice and integrating an inductive coupling plasma etching process and an anisotropy wet corrosion process, wherein the surfaces of the BDR and the F-P cavity are [111] surfaces ofsilicon crystal so as to enable the DBRs to have vertical mirror faces and smooth surfaces, thereby increasing the reflectivity of the DBRs and improving performance of the filter.

Description

technical field [0001] The invention belongs to the field of optoelectronic devices, and relates to a tunable optical filter driven by an electrostatic comb electrode based on an SOI optical waveguide and an F-P cavity and a preparation method thereof. Background technique [0002] A tunable optical filter (TOF) is a wavelength selective device, and its function is to select an optical signal of a specific wavelength from many input optical signals of different wavelengths as required. It can form a variety of demultiplexers in Dense Wavelength Division Multiplexing (DWDM) systems to separate the multiplexed lights. The key device of the new generation of all-optical network, the Optical Add-Add / Add-Demultiplexer (OADM), can also be composed of filters. Tunable optical filters should have high selectivity, low crosstalk, flat passband, low insertion loss, wide adjustable wavelength range, fast tuning speed, and potential price advantages. [0003] There are many ways to re...

AI Technical Summary

Problems solved by technology

When using a planar process to fabricate a multilayer film with an F-P cavity and a distributed Bragg reflector (DBR) structure, in order to ensure that the DBR has a high reflectivity, it is necessary to sequentially perform a complex deposition process on the substrate, and the fabrication process is complicated.

The filter with this structure needs to couple the optical fiber perpendicular to the substrate, which increases the difficulty of coupling and packaging, and is not conducive to the integration with other optical devices

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