Gas-sensitive transducer with nano wall structure and preparation method thereof

A gas-sensing sensor and nano-wall technology, applied in the field of gas-sensing sensors, can solve problems such as poor selectivity and stability, and achieve the effects of controllable structure, improved sensitivity and performance optimization.

Inactive Publication Date: 2010-05-05
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still some problems in the gas sensors currently

Method used

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  • Gas-sensitive transducer with nano wall structure and preparation method thereof
  • Gas-sensitive transducer with nano wall structure and preparation method thereof
  • Gas-sensitive transducer with nano wall structure and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0018] The preparation method specifically comprises the following steps:

[0019] 1) Pretreatment of the substrate made of pure aluminum:

[0020] High-temperature annealing is used to eliminate the residual stress of the aluminum sheet, and electrochemical polishing is used to eliminate scratches on the surface of the aluminum sheet, in order to avoid scratches from destroying the regularity of the oxidation growth of the aluminum sheet;

[0021] 2) Carry out anodic oxidation to step 1) gained pure aluminum substrate 6:

[0022] It is divided into three steps, that is, primary anodic oxidation, removal of the oxide film of primary oxidation and secondary anodic oxidation; finally, a porous anodic oxidation template with porous alumina 4 on the surface and dense alumina 5 on the bottom layer is formed;

[0023] 3) Reaming the porous anodized template obtained in step 2):

[0024] Etching the formed pores to increase their diameter;

[0025] 4) Sensitive material deposition...

Embodiment 1

[0062] Embodiment 1: technical solution

[0063] Aluminum base pretreatment

reason

Anodic oxidation of pure aluminum substrates

change

Plating of sensitive materials

Printed electrodes and circuits

stress relief

Fire: 480°C

keep warm for 1 hour

annealing. surface

polishing:

0.2mol / l

NaOH solution

Soak 2

minutes, then

at 1:4

perchloric acid and

Absolute ethanol

hybrid electric

20V in solution

DC voltage

Electrolytic throwing

Light for 2 minutes.

One-time anodizing: with

made of 0.5mol / l

Oxalic acid solution, at 30V,

Oxidation 4 at 10°C

Hour. remove primary oxygen

Chemical film: 6wt% phosphoric acid

solution and 1.8wt% of

chromic acid solution

Soak in mixed solution at 60°C

3 hours for oxidation

membrane. Secondary anodizing:

Secondary oxidation time 5 hours

, the parameters are the same...

Embodiment 2

[0066] Embodiment 2: technical solution

[0067] Aluminum base pretreatment

Anodic Oxidation of Pure Aluminum Substrate

Plating of sensitive materials

Printed electrodes and circuits

Same as Example 1

1.5mol / l in primary anodic oxidation

of sulfuric acid solution at 30V at 10°C

The next oxidation is 3 hours. The rest are the same

Example 1

Same as Example 1

When configuring the resistance slurry, the last stirring

Organic vehicle is 70%. Electrode paste with

Set time, final ultrasonic pulverization time 2

Hour. All the other are the same as embodiment 1

[0068] The performance of the sensor prepared by embodiment 2:

[0069]

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PUM

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Abstract

The invention provides a gas-sensitive transducer with a nano wall structure and a preparation method thereof. The transducer sequentially comprises a measurement circuit, a measurement electrode, a nano wall structure sensitive material, porous alumina, compact alumina, pure aluminum, a sensitive material, a heating material, a heating electrode and a heating circuit which are in close contact from top to bottom. The preparation method of the transducer comprises the steps of: preprocessing the pure aluminum, and then forming a porous anode oxidation template by using a secondary anode oxidation method, wherein the surface of the porous anode oxidation template is provided with the porous alumina and the bottom layer is provided with the compact alumina; preparing the sensitive material with the nano wall structure on the template by adopting a sol-gel coating method; and preparing the measurement circuit, the measurement electrode, the heating material, the heating electrode and the heating circuit by adopting a screen printing method, i.e. assembling the gas-sensitive transducer with the nano wall structure. The transducer has better sensitivity, optimized performance and controllable structure.

Description

technical field [0001] The invention relates to a gas sensor, in particular to a gas sensor probe prepared (assembled) with a porous anodized aluminum template as a substrate, which has controllable performance, good consistency and stability, high sensitivity, and low working temperature. its preparation method. Background technique [0002] With the improvement of people's living standards and the increasing emphasis on environmental protection, higher requirements are put forward for the detection of various toxic and harmful gases, the monitoring of air pollution and industrial waste gas, and the detection of food and living environment quality. Therefore, a gas sensor as one of the sensory or signal input parts is essential. Gas sensors can detect and analyze various gases in real time, and have the advantages of high sensitivity and short response time; coupled with the rapid development of microelectronics, microprocessing technology, automation, and intelligent tech...

Claims

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Application Information

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IPC IPC(8): G01N27/12B82B3/00C21D1/30C25F3/20C25D11/12B41M1/12B41M7/00B41F15/36B41C1/14G03F7/00
Inventor 夏志林郭培涛薛亦渝孟正华
Owner WUHAN UNIV OF TECH
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