Mask aligner mask platform adopting magnetic suspension technology

Abstract

The invention provides a mask aligner mask platform adopting the magnetic suspension technology. The mask aligner mask platform mainly comprises a precision slideway, a base, a suspension and the like, wherein the inside of the suspension is provided with an electromagnet which combines with a vortex displacement sensor to realize that the suspension is suspended above the slideway stably; the stator of a linear electric motor is fixed on the base, the rotor of the linear electric motor is fixed on the suspension; and the slideway surface is provided with a linear scale which combines with a linear scale reading-head arranged on the suspension to realize the precise and linear positioning motion of the suspension. The magnetic suspension mask aligner mask platform provided by the invention utilizes electromagnetic attraction and electromagnetic linear drive to ensure that the mask aligner mask platform can perform precise and fast reciprocating linear positioning motion, realize the functions of ultra-clean, high-speed, long-distance and precise positioning motion and the like which can not be realized by using the traditional scheme using a rotary servo motor for drive, a precision ball lead screw for transmission and a slideguide for support, and have higher suspension stiffness and better load-bearing characteristic than the gas phase suspension mask aligner mask platform.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision processing and testing equipment, and relates to a photolithography machine mask table using magnetic levitation technology. The mask table is mainly used in semiconductor photolithography machines. technical background [0002] Lithography machine technology is the most widely used technology in the field of microfabrication and the core technology in the field of integrated circuit manufacturing. The mechanical structure system of the lithography machine includes a workbench, a mask table, a base, a bracket, an objective lens and a measurement system installation platform, and a vibration reduction device. The movement speed of the mask table determines the production efficiency of the lithography machine, and the mask table The positioning accuracy of the lithography machine determines the exposure accuracy of the lithography machine. The mask table with six-axis high-precision position...

AI Technical Summary

Problems solved by technology

The conventional positioning scheme adopts the mechanical rigid contact method of rotary servo motor drive, precision ball screw drive and sliding guide rail support. This method has friction and wear, produces metal dust, and requires lubrication, and it also needs to be lubricated during startup, acceleration (deceleration), When reversing and parking, the elastic deformation, friction, coupling gap and backlash generated by the intermediate link will cause the lag and nonlinear error of the feed movement, and various connection gaps affect the positioning accuracy

The emergence of linear motors overcomes the shortcomings of the rotary motor plus screw drive mode, greatly improving its feed performance, but the metal dust generated by friction is still not conducive to the improvement of the performance and quality of integrated circuit chips

Although the air-floating support method studied in recent years has eliminated friction, because the air-floating platform uses the control of air to accelerate the flow through the air nozzle, it will generate an impact force on the guide rail, so the impact resistance is low, and the air-floating platform is limited to air flow relative to In a small space, when the external air flow is large, it will have a certain impact on its movement. In addition, the air bearing capacity is low, the support stiffness is small, and it is not suitable for working in a vacuum environment, which greatly reduces its advantages.

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