Boron diffusion method for N-type crystalline silica solar cell
A technology of solar cells and diffusion methods, applied in the directions of crystal growth, diffusion/doping, chemical instruments and methods, etc., can solve the problems of reducing the photoelectric conversion efficiency of the battery, increasing the series resistance of the battery, and reducing the surface boron concentration, and avoiding the The difficulty of metallization and sintering, the effect of increasing the surface boron concentration and the simple preparation method
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Embodiment 1
[0018] A method for boron diffusion of N-type crystalline silicon solar cells. A group of N-type monocrystalline silicon wafers (50 pieces) after texturing and cleaning are processed as follows:
[0019] (1) Heat treatment in a nitrogen atmosphere at 800°C for 5 minutes, with a nitrogen flow rate of 5L / min;
[0020] (2) Diffusion with boron source at 1000°C for 20 minutes, nitrogen flow rate is 13 L / min, oxygen flow rate is 0.5 L / min, BBr 3 Flow 1.5L / min;
[0021] (3) Continue to cool down to 760°C to complete the diffusion process; the nitrogen flow rate is 8 L / min.
[0022] After the diffusion is completed, 5 silicon wafers are extracted from each uniform position in the silicon wafers obtained in the foregoing embodiments, and the electrochemical capacitance voltage method is used to test the sheet resistance, and the following surface boron concentration test data are obtained:
[0023] Embodiment one:
[0024] Location Surface boron concentration (cm -3 ) ...
Embodiment 2
[0027] A method for boron diffusion of an N-type crystalline silicon solar cell, comprising the following steps of treating a group of N-type monocrystalline silicon wafers (50 pieces) after texturing and cleaning as follows:
[0028] (1) Heat treatment in a nitrogen atmosphere at 850°C for 5 minutes, with a nitrogen flow rate of 6L / min;
[0029] (2) Diffusion with boron source at 1050°C for 20 minutes, nitrogen flow at 15 L / min, oxygen flow at 0.6 L / min, BBr 3 Flow 1.6L / min;
[0030] (3) Continue to cool down to 800°C to complete the diffusion process; the nitrogen flow rate is 6 L / min.
[0031] After the diffusion was completed, 5 silicon wafers were taken from a uniform position to test the boron concentration on the surface to obtain the following data:
[0032] Location Surface boron concentration (cm -3 ) 5 4.4×10 20 13 4.6×10 20 26 4.8×10 20 35 4.5×10 20 46 4.3×10 20
[0033] As can be seen from the above two examples, th...
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