Method for Improving Oxidation Resistance of Graphite Electrodes by Chemical Vapor Deposition SIC/C Gradient Surface Coating
A technology of chemical vapor deposition and graphite electrodes, which is applied in the direction of coating, gaseous chemical plating, metal material coating technology, etc., can solve the problems of decreased protection effect, improve oxidation resistance, enhance bonding degree, and reduce steel consumption per ton volume reduction effect
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[0023] Example 1
[0024] The ultra-high power graphite electrode with a diameter of 450mm and a length of 1500mm is selected as the substrate, and the graphite electrode is processed according to the following process:
[0025] Step 1. Perform surface cleaning, polishing, cleaning and drying on the graphite electrode.
[0026] Step 2: Fix the graphite electrode after surface pretreatment on the support in the water-cooled reaction furnace of the chemical vapor deposition equipment, and evacuate the furnace to 0.2Pa.
[0027] Step 3. Heat the graphite electrode in the reaction furnace, and when the temperature reaches 1400℃, pass CH 4 The gas pressure in the reactor is maintained at 1kPa and maintained for 2h under this condition to form a layer of pyrolytic carbon on the surface of the graphite electrode.
[0028] Step 4. Infuse carrier gas H 2 , H 2 Via boiling SiCl 4 Liquid, SiCl 4 Bring out and with CH 4 The gas is reactively deposited on the surface of the graphite electrode. The r...
Example Embodiment
[0031] Example 2
[0032] The ultra-high power graphite electrode with a diameter of 450mm and a length of 1500mm is selected as the substrate, and the graphite electrode is processed according to the following process:
[0033] Step 1. Perform surface cleaning, polishing, cleaning and drying on the graphite electrode.
[0034] Step 2: Fix the graphite electrode after surface pretreatment on the support in the water-cooled reaction furnace of the chemical vapor deposition equipment, and evacuate the furnace to 0.5 Pa.
[0035] Step 3. Heat the graphite electrode in the reaction furnace. When the temperature reaches 1450℃, pass CH 4 The gas is used to maintain the pressure in the reactor at 1.5kPa and maintain it for 3h under this condition to form a layer of pyrolytic carbon on the surface of the graphite electrode.
[0036] Step 4. Infuse carrier gas H 2 , H 2 Via boiling SiCl 4 Liquid, SiCl 4 Bring out and with CH 4 The gas is reactively deposited on the surface of the graphite elect...
Example Embodiment
[0039] Example 3
[0040] The ultra-high power graphite electrode with a diameter of 450mm and a length of 1500mm is selected as the substrate, and the graphite electrode is processed according to the following process:
[0041] Step 1. Perform surface cleaning, polishing, cleaning and drying on the graphite electrode.
[0042] Step 2: Fix the graphite electrode after surface pretreatment on the support in the water-cooled reaction furnace of the chemical vapor deposition equipment, and evacuate the furnace to 0.8 Pa.
[0043] Step 3. Heat the graphite electrode in the reaction furnace. When the temperature reaches 1500℃, pass CH 4 The air pressure in the reactor is maintained at 2kPa and maintained for 1h under this condition to form a layer of pyrolytic carbon on the surface of the graphite electrode.
[0044] Step 4. Infuse carrier gas H 2 , H 2 Via boiling SiCl 4 Liquid, SiCl 4 Bring out and with CH 4 The gas is reactively deposited on the surface of the graphite electrode. The rea...
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