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Production method of diamond film coating of microbit

A diamond film and micro-drill technology, which is applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems that the diamond film does not have crystal plane structure, unfavorable continuous use of drill bits, insufficient strength and wear resistance, etc. , to achieve the effect of reducing graphitization tendency, strong wear-resistant cutting performance and improving adhesion

Inactive Publication Date: 2012-01-11
南通科创晶膜新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the one hand, the bonding force between the grown diamond coating film and the drill bit substrate is insufficient; on the other hand, the grown diamond coating film has more or less defects, and is not a continuous diamond film; in addition, the grown diamond film does not It has a (111) crystal structure, so the strength and wear resistance are not enough; it is also related to the thickness of the diamond film coating. If the film is too thick, its internal stress will increase, which is not conducive to the continuous use of the drill; if the film is too thin, the Easy to be worn out in a short time

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Surface treatment of PCB with a diameter of 0.15mm using a micro-drill, using inorganic acid H for acid etching 2 SO 4 , adding a certain proportion of hydrogen peroxide H 2 o 2 ; The oxidizing agent uses K 3 (Fe(CN) 6 , the base uses KOH.

[0027] Soak the top of the microdrill about 0.5 cm long in H 2 SO 1 :H 2 o 2 = 1:12 (mass ratio) mixed acid solution for 5 seconds; then placed in K 3 (Fe(CN) 6 :KOH:H 2 In the mixed solution of O=1:0.2:2, the corrosion temperature is 10°C, after ultrasonic cleaning for 1 minute; finally add H 2 SO 4 :H 2 o 2 =1:15 (mass ratio) mixed acid solution for 5 seconds, the acid etching temperature is 10 ° C, and then washed with water and dried.

[0028] Then, the hot wire chemical vapor CVD chemical vapor deposition method is used to put the surface-treated micro-drill into the growth chamber to grow and deposit the diamond film layer on the surface of the micro-drill.

[0029] In this example, H 2 Acetone is used as the ...

Embodiment 2

[0033] Surface treatment of PCB with a diameter of 0.3mm using a micro-drill, using inorganic acid HNO in acid etching 3 , adding a certain proportion of hydrogen peroxide H 2 o 2 ; The oxidizing agent uses K 3 (Fe(CN) 6 , the base uses KOH.

[0034] Soak the top of the microdrill about 0.5 cm long in HNO 3 :H 2 o 2 = 1:12 (mass ratio) mixed acid solution for 20 seconds; then placed in K 3 (Fe(CN) 6 :KOH:H 2 In the mixed solution of O=1:5:30, the corrosion temperature is 90°C, after ultrasonic cleaning for 5 minutes; finally add HNO 3 :H 2 o 2 = 1:15 (mass ratio) in the mixed acid solution for 10 seconds, the acid etching temperature control range is 90 ° C, and then washed with water and dried.

[0035] Then, the hot wire chemical vapor CVD chemical vapor deposition method is used to put the surface-treated micro-drill into the growth chamber to grow and deposit the diamond film layer on the surface of the micro-drill.

[0036] In this example, H 2 With acetone ...

Embodiment 3

[0040] Surface treatment of PCB with a diameter of 0.4mm using a micro-drill, using inorganic acid HNO in acid etching 3 , adding a certain proportion of hydrogen peroxide H 2 o 2 ; The oxidizing agent uses K 3 (Fe(CN) 6 , the base uses KOH.

[0041] Soak the top of the microdrill about 0.5 cm long in HNO 3 :H 2 o 2 = 1:10 (mass ratio) mixed acid solution for 30 seconds; then placed in K 3 (Fe(CN) 6 :KOH:H 2 In the mixed solution of O=1:0.5:8, the corrosion temperature is 25°C, after ultrasonic cleaning for 20 minutes; finally add HNO 3 :H 2 o 2 =1:15 (mass ratio) in the mixed acid solution for 15 seconds, the acid etching temperature control range is 30 ° C, and then washed with water and dried.

[0042] Then, the hot wire chemical vapor CVD chemical vapor deposition method is used to put the surface-treated micro-drill into the growth chamber to grow and deposit the diamond film layer on the surface of the micro-drill.

[0043] In this example, H 2 With methane...

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Abstract

The invention discloses a production method of a diamond film coating of a microbit, characterized in that: surface treatment is carried out on the substrate material of the microbit, a multi-steps deposition method is used, and the deposition growth conditions of the diamond film are controlled with hot-filament chemical vapor deposition method, wherein, the deposition growth conditions of the diamond film comprise the temperature of hot filaments, the pressure in the cavity, the selection of reaction source gas, distribution of flow and hot filaments, distance between the top end of the microbit and the hot filaments, spacing of the hot filaments distribution, deposition growth time of the diamond film, surface temperature of the top of the microbit, and the like. By adding the diamond film coating, the ware resistance and cutting ability of the microbit are reinforced, so that the service life of the micorbit is lengthened by more than 5-10 times and the precision of the microbit is not changed, and the frequency of changing drill of the drilling machine is reduced, the production efficiency is improved, and the production cost is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of micro-drill manufacturing and diamond film coating. Background technique [0002] Printed circuit board (PCB, Printed Circuit Board) is the substrate before assembling electronic components. At present, my country has become a major producer of semiconductor integrated circuit boards. The PCB drilling process is usually one of the bottlenecks in the production capacity of the PCB industry. Modern integrated circuit boards are made of fiber-reinforced composite materials and adopt a multi-layer copper wiring process, which is very abrasive to the carbide drill bit. The cost usually accounts for 30% to 40% of the PCB manufacturing cost. [0003] With the implementation of the European Union's WEEE (Waste Directive on Electrical and Electronic Products) and RollS (Restriction on the Use of Certain Hazardous Substances in Electrical and Electronic Equipment), the global PCB industry has entered an era of lea...

Claims

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Application Information

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IPC IPC(8): C23C16/27C23C16/02C23C16/44C23F1/30
Inventor 马科锋陈华孙爱武
Owner 南通科创晶膜新材料有限公司
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