Preparation method of novel superlarge-particle-size high-concentration silicon sol

Abstract

The invention provides a preparation method of novel superlarge-particle-size high-concentration silicon sol. The preparation method comprises the following steps: based on silicon powder, sodium hydroxide, ammonium ceric nitrate and pure water as raw materials, preparing the silicon powder into activated silicon powder, preparing sodium hydroxide into a sodium hydroxide catalyst, and preparing ammonium ceric nitrate into an ammonium ceric nitrate aqueous solution, wherein the weight ratio of silicon powder to sodium hydroxide to ammonium ceric nitrate is 200:3:1.5. The preparation method provided by the invention has the following technical effects: 1) by adopting a simple substance silicon hydrolysis method, the novel superlarge-particle-size silicon sol, which can be used for an abrasive material of a CMP (chemical-mechanical polishing) liquid, is prepared, wherein the particle size of the silicon sol is more than 150nm, and the concentration of the silicon sol is more than 45%, thus the concentration of the silicon sol is improved, and the stability of the silicon sol is good; 2) reaction time is short and is only 30 hours, thereby saving the reaction time; and 3) Ce doping is carried out in the preparation process, and the polishing rate is improved by about 15%, thereby effectively saving the polishing rate of the CMP liquid and reducing surface scratch and surface roughness after polishing.

Description

technical field [0001] The invention relates to a polishing liquid abrasive, in particular to a preparation method of a novel ultra-large particle size high-concentration silica sol, which belongs to the technical field of chemical industry. Background technique [0002] Silica sol, also known as silicic acid hydrosol or silica hydrosol, has been widely used in precision casting, catalyst carrier, coating, papermaking and textile industries. Due to its good water resistance, high temperature resistance, air permeability, dispersibility, skid resistance and non-polluting properties, silica sol has a special and important position in various fields. The current industrially mature preparation methods are ion exchange method and elemental silicon dissolution method. However, most of the products are silica sol with small particle size, and the storage time is short, which is inferior to developed countries in terms of variety and quality, especially in the production and appli...

AI Technical Summary

Problems solved by technology

The ion exchange method is a method commonly used in China, but it has many process procedures and consumes a lot of energy