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Porous silicon gas detecting device

A gas detection and detection device technology, applied in measurement devices, color/spectral characteristic measurement, instruments, etc., can solve the problems of difficult large-scale application, long time consumption, high cost, and achieve good accuracy, low price, and rapid accuracy. Effect

Active Publication Date: 2014-07-16
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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Problems solved by technology

Traditional harmful gas detection methods require large-scale analytical instruments or expensive and complex online monitoring systems, which are costly, time-consuming, and difficult to apply on a large scale

Method used

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Embodiment Construction

[0023] Porous silicon microcavity crystal (Porous silicon microcavity, PSM) includes a series of silicon etching layers with high and low porosity, mainly including two distributed Bragg reflection layers and an optical microcavity layer sandwiched between them. PSMs emit visible light at room temperature with a very narrow peak bandwidth. The detection of PSM electrical signals is mainly to change the concentration of free carriers in the porous layer by adsorbing gas molecules on the surface, or to change the conductance or capacitance caused by the change of dielectric constant caused by the concentrated gas in the pores; the detection of PSM optical signals is through Measure the refractive index, photoluminescence, birefringence or optical waveguide of PSM to realize the detection of gas components.

[0024] The preparation process of PSM includes: taking the appropriate size p + -Silicon wafer with (100) crystal plane, resistivity 0.004-0.008 ohm·em -1 , after ultrason...

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Abstract

The invention relates to a porous silicon gas detecting device, which comprises porous silicon microcavity crystal, a testing cavity, an optical fiber spectrometer and an electrical signal detecting system. The testing cavity is in hermetic connection fit with the porous silicon microcavity crystal, the surface of the porous silicon microcavity crystal is exposed inside the testing cavity, the optical fiber spectrometer is used for detecting and recording optical signals of the porous silicon microcavity crystal, and the electrical signal detecting system is connected with the porous silicon microcavity crystal to detect and analyze electrical signals of the porous silicon microcavity crystal. The testing cavity and monocrystalline silicon are directly combined into the testing cavity, no complex process is needed, implementation is easy, price is low, and popularization and application are facilitated. In addition, the surface of a porous silicon microcavity is functionally decorated, porous silicon optical signals and electrical signals are combined for synchronous detection of harmful gases prior to integral analysis of multiple parameters, and the analysis is quick and highly accurate.

Description

【Technical field】 [0001] The invention relates to the field of gas sensors, in particular to a porous silicon gas detection device. 【Background technique】 [0002] Environmental harmful gases mainly include air pollution gases and indoor harmful gases. Air pollution gases mainly refer to industrial waste gases such as sulfur oxides, nitrogen oxides, and carbon monoxide, as well as organic pollutant gases such as various aromatics and hydrocarbons in automobile exhaust, such as benzene, toluene, and xylene. Indoor harmful gases are caused by construction, decoration and furniture, among which harmful gases such as formaldehyde, benzene series and ammonia are the main ones that endanger people's health. Environmental harmful gases seriously affect people's health and living environment. With the improvement of people's environmental protection awareness and scientific progress, the detection of ambient air quality has attracted more and more attention. [0003] The tradition...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/25G01N27/00
Inventor 陈清伟蔡林涛李莎
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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