Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces

A composite surface treatment, molybdenum disilicide technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve problems such as poor corrosion resistance

Inactive Publication Date: 2012-08-22
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

③ Titanium alloys have poor corrosion resistance in non-oxidizing acidic media suc

Method used

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  • Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces
  • Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces
  • Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A composite surface treatment process for preparing an amorphous-nanocrystalline molybdenum disilicide-based wear-resistant and corrosion-resistant coating on the surface of a titanium alloy. The steps are:

[0027] a. First, double-cathode plasma sputtering deposition is carried out. The process parameters are as follows: target voltage 800V, workpiece voltage 400V, distance between target and workpiece 25mm, working pressure 40Pa, deposition temperature 800℃;

[0028] b. Then perform ion nitriding, the process parameters are as follows: workpiece voltage 800V, nitriding temperature 500°C, working pressure 35Pa, nitrogen partial pressure 0.5 Pa; ion nitriding time 1.5 hours;

[0029] c. Type of sputtering target: Mo 0.3 (Si 0.9 ,Al 0.1 ) 0.7 ;

[0030] d. The type of workpiece material: titanium alloy.

[0031] figure 1 The composition ratio prepared by the hot isostatic pressing process is Mo 0.3 (Si 0.90 ,Al 0.10 ) 0.7 The powder metallurgy sintered plat...

Embodiment 2

[0035] The composite surface treatment process of preparing amorphous-nanocrystalline molybdenum disilicide-based wear-resistant and corrosion-resistant coating on the surface of titanium alloy. The main preparation process steps are: a. First, double-cathode plasma sputtering deposition is carried out. The process parameters are as follows: target voltage 1000 V, the workpiece voltage is 450 V, the distance between the target and the workpiece is 30 mm, the working pressure is 45Pa, and the deposition temperature is 650°C; b. Then ion nitriding is carried out, and the process parameters are as follows: the workpiece voltage is 850V, the nitriding temperature is 600°C, and the working pressure is 45Pa , nitrogen partial pressure 1 Pa; ion nitriding time 2 hours; c. The type of sputtering target: Mo 0.3 (Si 0.90 ,Al 0.10 ) 0.7 ; d. The type of workpiece material: titanium alloy. The properties of the resulting coating were slightly lower than in Example 1.

[0036]

Embodiment 3

[0038] The composite surface treatment process of preparing amorphous-nanocrystalline molybdenum disilicide-based wear-resistant and corrosion-resistant coating on the surface of titanium alloy. The main preparation process steps are: a. First, double-cathode plasma sputtering deposition is carried out. The process parameters are as follows: target voltage 500 V, workpiece voltage 300V, distance between target and workpiece 10mm, working pressure 20Pa, deposition temperature 450°C; Partial pressure 0.1Pa; ion nitriding time 1 hour; c. Type of sputtering target: Mo 0.3 (Si 0.90 ,Al 0.10 ) 0.7 ; d. The type of workpiece material: titanium alloy. The properties of the resulting coating were slightly lower than in Example 1.

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Abstract

The main preparing process of a composite surface treatment process of preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces includes that double cathode plasma sputtering deposition is conducted, technological parameters include that the target material voltage is 500 V to 1000 V, the workpiece voltage is 300 V to 450 V, the distance between the target material and the workpiece is 10 mm to 30 mm, the working air pressure is 20 Pa to 45 Pa, and the deposition temperature is 450 DEG C to 850 DEG C; the kind of the sputtered target material is Mo 0.1-0.3 (Si 0.90, Al 10.10) 0.9-0.7; and the kind of the workpiece material is titanium alloy. The composite amorphous-nanocrystalline silicide layer has the advantages of high toughness, high hardness and good corrosion resistance, abrasion resistance and oxidation resistance.

Description

[0001] technical field [0002] The invention provides an in-situ preparation of multi-phase composite Si 3 N 4 / Mo 5 Si 3 / MoSi 2 A new composite surface treatment method for amorphous-nanocrystalline wear-resistant and corrosion-resistant coatings. It is suitable for the preparation of advanced surface high-strength toughness, high wear-resistant and corrosion-resistant composite materials on the surface of titanium alloys, involving metal-nonmetal plasma sputtering deposition technology, ion nitriding technology, in-situ synthesis and types of deposition materials. [0003] Background technique [0004] As an important structural material, titanium alloy has the advantages of low density, high specific strength, strong corrosion resistance and stable medium temperature performance, and has been widely used in aerospace, ships, petroleum, chemical, biomedical and other fields. However, the shortage of titanium alloys restricts the further expansion of its application...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/06
Inventor 徐江李正阳毛相震
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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