Titanium alloy surface high temperature oxidation resistance and wear resistance oxide gradient coat, and preparation method thereof
A technology of anti-high temperature oxidation and gradient coating, which is applied in the direction of metal material coating technology, coating, ion implantation plating, etc., can solve the problems of poor anti-high temperature oxidation performance, achieve strong anti-oxidation ability, high technical efficiency, The effect of dense and smooth film surface
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Embodiment 1
[0036] (1) Put the titanium alloy TC4 and Al-Cr-Ni alloy targets into the double-glow plasma surface alloying device, use the titanium alloy TC4 as the workpiece pole, and use the Al-Cr-Ni alloy target as the source. The composition ratio of Al-Cr-Ni alloy target material is: Al accounts for 50%, Cr accounts for 40%, and Ni accounts for 10%.
[0037] (2) Vacuumize to the ultimate vacuum degree, and send in argon. Start Glow, and adjust the process parameters to the following values:
[0038] Target voltage: 600 V;
[0039] Workpiece voltage: 400 V;
[0040] Argon pressure: 37 Pa;
[0041] Distance between target and workpiece: 10 mm;
[0042] (3) Stop the glow after 4 hours, cut off the power, and break the vacuum to atmospheric pressure.
[0043] (4) Open the device and take out the Al-Cr-Ni alloy target.
[0044] (5) Close the device, evacuate to the ultimate vacuum, and send in argon and oxygen. Start Glow, and adjust the process parameters to the following values: ...
Embodiment 2
[0053] (1) Put the titanium alloy TC11 and the Al-Cr-Ni alloy target into the double-glow plasma surface alloying device, use the titanium alloy TC11 as the workpiece electrode, and use the Al-Cr-Ni alloy target as the source electrode. The composition ratio (mass ratio) of the Al-Cr-Ni alloy target material is: Al accounts for 40%, Cr accounts for 30%, and Ni accounts for 30%.
[0054] (2) Vacuumize to the ultimate vacuum degree, and send in argon. Start Glow, and adjust the process parameters to the following values:
[0055] Target voltage: 700 V;
[0056] Workpiece voltage: 500 V;
[0057] Argon pressure: 52 Pa;
[0058] Distance between target and workpiece: 15 mm;
[0059] (3) Stop the glow after 4 hours, cut off the power, and break the vacuum to atmospheric pressure.
[0060] (4) Open the device and take out the Cr-Ni alloy target.
[0061] (5) Close the device, evacuate to the ultimate vacuum, and send in argon and oxygen. Start Glow, and adjust the process par...
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