Suede structure of crystalline silicon solar cells and manufacture method thereof

A technology for solar cells and crystalline silicon, applied in the field of solar energy, can solve the problems of expensive equipment, low surface reflectivity, low battery efficiency, etc., and achieve the effects of simple and easy preparation method, reducing surface reflectivity, and improving conversion efficiency

Active Publication Date: 2013-03-27
YANCHENG CANADIAN SOLAR INC
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the mechanical grooving method can obtain lower surface reflectivity, but this method causes serious mechanical damage to the surface of the silicon wafer, and its yield is relatively low, so it is rarely used in industrial production.
For the laser etching method, lasers are used to make different groove patterns. Striped and inverted pyramid-shaped surfaces have been fabricated. The reflectivity can be as low as 8.3%, but the efficiency of the cells made by them is relatively high. low and cannot be effectively used in production
The RIE method can use different templates f...

Method used

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  • Suede structure of crystalline silicon solar cells and manufacture method thereof
  • Suede structure of crystalline silicon solar cells and manufacture method thereof
  • Suede structure of crystalline silicon solar cells and manufacture method thereof

Examples

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Embodiment 1

[0030] see Figure 1~2 Shown, a kind of preparation method of the textured structure of crystalline silicon solar cell comprises the steps:

[0031] (1) Corroding the conventional polycrystalline P156 silicon wafer with the same crystal orientation by acid solution to form a micron-scale suede structure on the surface of the silicon wafer; the concentration ratio of the acid solution is HF:HNO 3 =1: HNO of 5.7 3 -HF system, the depth of corrosion is 7~8 microns, and then after a series of cleaning and drying;

[0032] (2) Perform gas etching on the silicon wafer obtained in step (1): place the dried polysilicon wafer horizontally above the etching gas, and under the action of draft (pressure -50~-500 Pa), the gas will mix with silicon The silicon wafer is fully contacted to achieve single-sided vapor phase etching of the silicon wafer. After 1-2 minutes of etching, the surface of the silicon wafer turns black;

[0033] The corrosive gas used is produced in this way: the vol...

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Abstract

The invention discloses a manufacture method of a suede structure of crystalline silicon solar cells. The manufacture method comprises the following steps of (1) corroding a silicon wafer to be processed through acid liquor or alkali liquor and forming a micron-scale suede structure on the surface of the silicon wafer; and (2) conducting gaseous corrosion on the silicon wafer obtained in the step (1), further forming a nano-scale suede structure on the micron-scale suede structure. Gass for gaseous corrosion comprises nitric oxide gas, steam and hydrogen fluoride, and the nitric oxide gas is one or a plurality of nitric oxide, nitrogen dioxide and nitrogen tetroxide. The nano-scale suede structure is further formed on the micron-scale suede structure through the gaseous corrosion on the basis of the existing micron-scale suede structure, and surface reflectivity is further reduced.

Description

technical field [0001] The invention relates to a textured surface structure of a crystalline silicon solar cell and a preparation method thereof, belonging to the technical field of solar energy. Background technique [0002] With the wide application of solar cell components, photovoltaic power generation occupies an increasingly important proportion in new energy and has achieved rapid development. At present, in the production process of solar cells, the textured structure on the surface of silicon wafers can effectively reduce the surface reflectance of solar cells, which is one of the important factors affecting the photoelectric conversion efficiency of solar cells. [0003] In order to obtain a good textured structure on the surface of crystalline silicon solar cells to achieve a better anti-reflection effect, many methods have been tried, including mechanical grooving, laser etching, and reactive ion etching (RIE). , Isotropic chemical etching method, etc. Among t...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/0236
CPCY02E10/50Y02P70/50
Inventor 周军姜小松贺文慧朱娟娟党继东孟祥熙辛国军
Owner YANCHENG CANADIAN SOLAR INC
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