Transparent electrically conductive film, method for manufacturing transparent electrically conductive film, photoelectric conversion device and electronic equipment
A photoelectric conversion device, transparent conductive film technology, applied in cable/conductor manufacturing, electrolytic capacitors, final product manufacturing, etc., can solve the problems of low corrosion resistance, low thermal stability, low flexibility, etc., to improve corrosion resistance, The effect of excellent corrosion resistance and high electrical conductivity
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no. 1 example
[0086] [Transparent Conductive Film]
[0087] Such as figure 1 As shown in A, in the transparent conductive film according to the first embodiment, the metal thin wire mesh layer 12 is arranged on the transparent substrate 11, and one or more graphene layers 13 are arranged on the metal thin wire mesh layer 12 . The metal fine wire mesh layer 12 is completely covered by the graphene layer 13 .
[0088] The transparent substrate 11 does not need to be flexible. The material of the transparent substrate 11 is appropriately selected according to the intended use of the transparent conductive film and the like, and examples of the material include transparent inorganic materials such as quartz and glass, and transparent plastics. A transparent plastic substrate is used as the flexible transparent substrate 11 . Examples of transparent plastics include polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polystyrene, polyethylene, polypropylene, polyphenylene s...
example 1
[0112] As the first substrate 14 , an electrolytic copper foil (manufactured by Furukawa Electric Co., Ltd.) processed to have a size of 10 cm×10 cm and a thickness of 9 μm was used.
[0113] On the electrolytic copper foil, a graphene layer was formed in the same manner as in Non-Patent Document 1. That is, the electrolytic copper foil was placed in a tubular furnace of a CVD apparatus, and kept at 1000° C. for 30 minutes under a hydrogen gas flow. Thereafter, a graphene layer was grown on the electrolytic copper foil for 15 minutes under a gas flow of a mixed gas of methane and hydrogen. After the graphene layer has grown, the temperature is lowered under another flow of hydrogen. Thereafter, the electrolytic copper foil on which the graphene layer was grown was taken out from the tubular furnace.
[0114] Next, as the second substrate 15 , a PDMS / PET film was used, and the PDMS / PET film was bonded to the graphene layer on the electrolytic copper foil to be a support.
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example 2
[0120] A transparent conductive film was produced in the same manner as in Example 1, except that the pitch, width and thickness of the metal fine wire portion of the metal fine wire mesh layer were 600 μm, 9 μm and 10 μm, respectively.
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