Laser scanning processing device
A laser scanning and processing device technology, which is applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problem of inability to achieve coaxial air blowing of static focused laser beams, etc.
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[0042] Example 1:
[0043] figure 1 Schematic diagram of the device structure for laser drilling of silicon wafers, such as figure 1 As shown: the silicon wafer laser drilling device includes a galvanometer scanning focusing module 20, a positive pressure gas cavity 11, a blowing mask 14 and a negative pressure gas cavity 13. The galvanometer scanning and focusing module 20 includes a scanning galvanometer and a flat-field scanning focusing lens 10.
[0044] The scanning galvanometer includes a first mirror 6, a first motor 7 for driving the first mirror 6, a second mirror 3, a second motor for driving the second mirror 3, and a scanning galvanometer housing 9 A laser incident port is provided on the side of the scanning galvanometer housing facing the incident laser beam, and the first mirror 6, the first motor 7, the second mirror 3, and the second motor are located in the scanning oscillator. Inside the mirror housing 9. The first reflecting mirror 6 of the scanning galvanomet...
Example Embodiment
[0056] Example 2:
[0057] figure 2 Schematic diagram of the device structure for laser drilling of low-temperature co-fired ceramics, such as figure 2 As shown: the low-temperature co-fired ceramic laser drilling device includes a galvanometer scanning and focusing module 20, a positive pressure gas cavity 11, a blowing mask 14 and a negative pressure gas cavity 13. The galvanometer scanning and focusing module 20 includes a dynamic focusing mirror 16 and a scanning galvanometer.
[0058] The dynamic focus lens 16 has a wavelength of 1064 nanometers, a center focal length of 500 millimeters, and a focused spot of 50 microns.
[0059] The scanning galvanometer includes a first mirror 6, a first motor 7 for driving the first mirror 6, a second mirror 3, a second motor for driving the second mirror 3, and a scanning galvanometer housing 9 . The first mirror 6, the first motor 7, the second mirror 3 and the second motor are located in the scanning galvanometer housing 9. A laser in...
Example Embodiment
[0070] Example 3:
[0071] image 3 Schematic diagram of the device structure for laser drilling of copper sheets, such as image 3 As shown: the copper sheet laser drilling device includes a galvanometer scanning and focusing module 20, an air blowing mask plate 14 and a negative pressure gas cavity 13. The galvanometer scanning and focusing module 20 includes a scanning galvanometer and a flat field scanning focusing mirror 10.
[0072] The scanning galvanometer includes a first mirror 6, a first motor 7 for driving the first mirror, a second mirror 3, a second motor for driving the second mirror 3, and a scanning galvanometer housing 9, The first mirror 6, the first motor 7, the second mirror 3, and the second motor are located in the scanning galvanometer housing 9, and the scanning galvanometer housing is provided on the side facing the incident laser beam. For the laser incident port, the first motor spindle and the second motor spindle are perpendicular to each other. The f...
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